Abstract: Gate-all-around integrated circuit structures having a doped subfin, and methods of fabricating gate-all-around integrated circuit structures having a doped subfin, are described. For example, an integrated circuit structure includes a subfin structure having well dopants. A vertical arrangement of horizontal semiconductor nanowires is over the subfin structure. A gate stack is surrounding a channel region of the vertical arrangement of horizontal semiconductor nanowires, the gate stack overlying the subfin structure. A pair of epitaxial source or drain structures is at first and second ends of the vertical arrangement of horizontal semiconductor nanowires.

Abstract: Structures having vertical keeper or power gate for backside power delivery are described. In an example, an integrated circuit structure includes a front-side structure including a device layer having a plurality of fin-based transistors, and a plurality of metallization layers above the fin-based transistors of the device layer. A backside structure is below the fin-based transistors of the device layer. The backside structure includes a ground metal line. One or more vertical gate all-around transistors is between the fin-based transistors of the device layer and the ground metal line of the backside structure.

Abstract: Integrated circuitry comprising transistor structures having a channel portion over a base portion of fin. The base portion of the fin is an insulative amorphous oxide, or a counter-doped crystalline material. Transistor structures, such as channel portions of a fin and source and drain materials may be first formed with epitaxial processes seeded by a front side of a crystalline substrate. Following front side processing, a backside of the transistor structures may be exposed and the base portion of the fin modified from the crystalline substrate composition into the amorphous oxide or counter-doped crystalline material using backside processes and low temperatures that avoid degradation to the channel material while reducing transistor off-state leakage.

Abstract: Gate-all-around integrated circuit structures having necked features, and methods of fabricating gate-all-around integrated circuit structures having necked features, are described. In an example, an integrated circuit structure includes a vertical stack of horizontal nanowires. Each nanowire of the vertical stack of horizontal nanowires has a channel portion with a first vertical thickness and has end portions with a second vertical thickness greater than the first vertical thickness. A gate stack is surrounding the channel portion of each nanowire of the vertical stack of horizontal nanowires.

Abstract: Structures having memory access transistors with backside contacts are described. In an example, an integrated circuit structure includes a front-side structure including a device layer having a fin-based transistor, and a capacitor structure above the fin-based transistor of the device layer. A backside structure is below the front-side structure. The backside structure includes a conductive contact electrically connected to the fin-based transistor of the device layer.

Abstract: Structures having airgaps for backside signal routing or power delivery are described. In an example, an integrated circuit structure includes a front-side structure including a device layer having a plurality of nanowire-based transistors, and a plurality of metallization layers above the nanowire-based transistors of the device layer. A backside structure is below the nanowire-based transistors of the device layer. The backside structure includes a first conductive line laterally spaced apart from a second conductive line by an air gap.

Abstract: Gate-all-around integrated circuit structures having a doped subfin, and methods of fabricating gate-all-around integrated circuit structures having a doped subfin, are described. For example, an integrated circuit structure includes a subfin structure having well dopants. A vertical arrangement of horizontal semiconductor nanowires is over the subfin structure. A gate stack is surrounding a channel region of the vertical arrangement of horizontal semiconductor nanowires, the gate stack overlying the subfin structure. A pair of epitaxial source or drain structures is at first and second ends of the vertical arrangement of horizontal semiconductor nanowires.

Abstract: Structures having ultra-high conductivity global routing are described. In an example, an integrated circuit structure includes a device layer having a plurality of transistors. A plurality of metallization layers is above the plurality of transistors of the device layer. One or more of the metal layers includes a material having a critical temperature greater than 10 Kelvin and less than 300 Kelvin.

Abstract: Gate-all-around integrated circuit structures having necked features, and methods of fabricating gate-all-around integrated circuit structures having necked features, are described. In an example, an integrated circuit structure includes a vertical stack of horizontal nanowires. Each nanowire of the vertical stack of horizontal nanowires has a channel portion with a first vertical thickness and has end portions with a second vertical thickness greater than the first vertical thickness. A gate stack is surrounding the channel portion of each nanowire of the vertical stack of horizontal nanowires.

Abstract: Embodiments of the present disclosure include integrated circuit structures having differentiated channel sizing, and methods of fabricating integrated circuit structures having differentiated channel sizing. In an example, a structure includes a memory region having a first vertical stack of horizontal nanowires having a first number of nanowires. The integrated circuit structure also includes a logic region having a second vertical stack of horizontal nanowires spaced apart from the first vertical stack of horizontal nanowires. The second vertical stack of horizontal nanowires has a second number of nanowires less than the first number of nanowires.

Abstract: Structures having ultra-high conductivity global routing are described. In an example, an integrated circuit structure includes a device layer having a plurality of transistors. A plurality of metallization layers is above the plurality of transistors of the device layer. One or more of the metal layers includes a material having a critical temperature greater than 10 Kelvin and less than 300 Kelvin.

Abstract: Gate-all-around integrated circuit structures having an insulator fin on an insulator substrate, and methods of fabricating gate-all-around integrated circuit structures having an insulator fin on an insulator substrate, are described. For example, an integrated circuit structure includes an insulator fin on an insulator substrate. A vertical arrangement of horizontal semiconductor nanowires is over the insulator fin. A gate stack surrounds a channel region of the vertical arrangement of horizontal semiconductor nanowires, and the gate stack is overlying the insulator fin. A pair of epitaxial source or drain structures is at first and second ends of the vertical arrangement of horizontal semiconductor nanowires and at first and second ends of the insulator fin.

Abstract: An integrated circuit (IC) device includes transistors between front- and back-side interconnect layers and having source and/or drain regions with front- and back-side contacts. The transistors may be between isolation structures on a same pitch as the transistor gates, sources, and drains. Via structures adjacent to the transistors couple between the front- and back-side interconnect layers. The transistors and isolation and via structures may be utilized in various logic cells. Transistors having front- and back-side source and/or drain contacts may include vias through or alongside the source and/or drain regions.

Abstract: Embodiments disclosed herein include forksheet transistor devices having a dielectric or a conductive spine. For example, an integrated circuit structure includes a dielectric spine. A first transistor device includes a first vertical stack of semiconductor channels spaced apart from a first edge of the dielectric spine. A second transistor device includes a second vertical stack of semiconductor channels spaced apart from a second edge of the dielectric spine. An N-type gate structure is on the first vertical stack of semiconductor channels, a portion of the N-type gate structure laterally between and in contact with the first edge of the dielectric spine and the first vertical stack of semiconductor channels. A P-type gate structure is on the second vertical stack of semiconductor channels, a portion of the P-type gate structure laterally between and in contact with the second edge of the dielectric spine and the second vertical stack of semiconductor channels.

Abstract: Gate-all-around integrated circuit structures having an insulator fin on an insulator substrate, and methods of fabricating gate-all-around integrated circuit structures having an insulator fin on an insulator substrate, are described. For example, an integrated circuit structure includes an insulator fin on an insulator substrate. A vertical arrangement of horizontal semiconductor nanowires is over the insulator fin. A gate stack surrounds a channel region of the vertical arrangement of horizontal semiconductor nanowires, and the gate stack is overlying the insulator fin. A pair of epitaxial source or drain structures is at first and second ends of the vertical arrangement of horizontal semiconductor nanowires and at first and second ends of the insulator fin.

Abstract: Embodiments disclosed herein include forksheet transistor devices having a dielectric or a conductive spine. For example, an integrated circuit structure includes a dielectric spine. A first transistor device includes a first vertical stack of semiconductor channels spaced apart from a first edge of the dielectric spine. A second transistor device includes a second vertical stack of semiconductor channels spaced apart from a second edge of the dielectric spine. An N-type gate structure is on the first vertical stack of semiconductor channels, a portion of the N-type gate structure laterally between and in contact with the first edge of the dielectric spine and the first vertical stack of semiconductor channels. A P-type gate structure is on the second vertical stack of semiconductor channels, a portion of the P-type gate structure laterally between and in contact with the second edge of the dielectric spine and the second vertical stack of semiconductor channels.

Abstract: Fin doping, and integrated circuit structures resulting therefrom, are described. In an example, an integrated circuit structure includes a semiconductor fin. A lower portion of the semiconductor fin includes a region having both N-type dopants and P-type dopants with a net excess of the P-type dopants of at least 2E18 atoms/cm3. A gate stack is over and conformal with an upper portion of the semiconductor fin. A first source or drain region is at a first side of the gate stack, and a second source or drain region is at a second side of the gate stack opposite the first side of the gate stack.

Abstract: Embodiments disclosed herein include forksheet transistor devices having a dielectric or a conductive spine. For example, an integrated circuit structure includes a dielectric spine. A first transistor device includes a first vertical stack of semiconductor channels spaced apart from a first edge of the dielectric spine. A second transistor device includes a second vertical stack of semiconductor channels spaced apart from a second edge of the dielectric spine. An N-type gate structure is on the first vertical stack of semiconductor channels, a portion of the N-type gate structure laterally between and in contact with the first edge of the dielectric spine and the first vertical stack of semiconductor channels. A P-type gate structure is on the second vertical stack of semiconductor channels, a portion of the P-type gate structure laterally between and in contact with the second edge of the dielectric spine and the second vertical stack of semiconductor channels.

Abstract: Gate-all-around integrated circuit structures having an insulator fin on an insulator substrate, and methods of fabricating gate-all-around integrated circuit structures having an insulator fin on an insulator substrate, are described. For example, an integrated circuit structure includes an insulator fin on an insulator substrate. A vertical arrangement of horizontal semiconductor nanowires is over the insulator fin. A gate stack surrounds a channel region of the vertical arrangement of horizontal semiconductor nanowires, and the gate stack is overlying the insulator fin. A pair of epitaxial source or drain structures is at first and second ends of the vertical arrangement of horizontal semiconductor nanowires and at first and second ends of the insulator fin.

Abstract: Embodiments disclosed herein include forksheet transistor devices having a dielectric or a conductive spine. For example, an integrated circuit structure includes a dielectric spine. A first transistor device includes a first vertical stack of semiconductor channels spaced apart from a first edge of the dielectric spine. A second transistor device includes a second vertical stack of semiconductor channels spaced apart from a second edge of the dielectric spine. An N-type gate structure is on the first vertical stack of semiconductor channels, a portion of the N-type gate structure laterally between and in contact with the first edge of the dielectric spine and the first vertical stack of semiconductor channels. A P-type gate structure is on the second vertical stack of semiconductor channels, a portion of the P-type gate structure laterally between and in contact with the second edge of the dielectric spine and the second vertical stack of semiconductor channels.