Patents by Inventor Courtney T. Sheets

Courtney T. Sheets has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LASER ABLATION SYSTEM INCLUDING VARIABLE ENERGY BEAM TO MINIMIZE ETCH-STOP MATERIAL DAMAGE
    Publication number: 20160184926
    Abstract: An ablation system includes an ablation tool configured to generate an energy beam to ablate an energy-sensitive material formed on at least one embedded feature of a workpiece. The ablation tool selects an initial fluence and an initial pulse rate of the energy beam to ablate a first portion of the energy-sensitive layer. The ablation tool further reduces at least one of the initial fluence and the initial pulse rate of the energy beam to ablate a second remaining portion of the energy-sensitive layer such that the embedded feature is exposed without being damaged or deformed.
    Type: Application
    Filed: December 30, 2014
    Publication date: June 30, 2016
    Inventors: Courtney T. Sheets, Matthew E. Souter, Brian M. Erwin, Bouwe W. Leenstra, Nicholas A. Polomoff, Christopher L. Tessler