Patents by Inventor Craig C. Clabough

Craig C. Clabough has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20040229477
    Abstract: A method and apparatus for depositing material from a target onto a semiconductor wafer. The wafer is positioned above a chuck that is heated by a chuck heater. Radiant heat flow from the chuck to the wafer is the primary heat source for the wafer. Thus by controlling the chuck heater temperature the wafer temperature can be maintained within a desired range to effectuate desired characteristics in the deposited material.
    Type: Application
    Filed: July 8, 2003
    Publication date: November 18, 2004
    Inventors: Timothy J. Daniel, Joseph W. Buckfeller, Craig C. Clabough, Catherine Vartuli