Patents by Inventor Craig C. Ramsey
Craig C. Ramsey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8823933Abstract: A substrate-like particle sensor includes a substrate-like base portion and an electronics enclosure disposed on the substrate-like base portion. A power source is located within the electronics enclosure. A controller is operably coupled to the power source. A particle sensor is operably coupled to the controller and provides an indication to the controller of at least one particle present near the particle sensor.Type: GrantFiled: September 27, 2007Date of Patent: September 2, 2014Assignee: CyberOptics CorporationInventors: Dennis J. Bonciolini, Craig C. Ramsey, DelRae H. Gardner, Felix J. Schuda
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Patent number: 7893697Abstract: A sensor for sensing a gap between the sensor and an object of interest within a semiconductor processing chamber is provided. The sensor includes a housing, a power source inside the housing, wireless communication circuitry, a controller, measurement circuitry and a plurality of capacitive plate pairs. The controller and wireless communication circuitry are coupled to each other, and to the power source. The plurality of capacitive plate pairs are configured to form capacitors having a capacitance that varies with the gap. Measurement circuitry is coupled to the controller and to the plurality of capacitive plate pairs. The measurement circuitry is configured to measure the capacitance of the capacitive plate pairs and provide indications thereof to the controller. The controller is configured to provide an indication relative to the gap based, at least in part, upon the measured capacitances.Type: GrantFiled: March 26, 2008Date of Patent: February 22, 2011Assignee: CyberOptics Semiconductor, Inc.Inventors: Craig C. Ramsey, DelRae H. Gardner
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Patent number: 7804306Abstract: A wireless sensor includes at least one capacitive plate for sensing a distance relative to an object of interest within a semiconductor-processing environment. The sensor includes an internal power source and wireless communication such that distance and/or parallelism measurements effected using the capacitive plate(s) can be provided wirelessly to an external device.Type: GrantFiled: February 20, 2007Date of Patent: September 28, 2010Assignee: CyterOptics Semiconductor, Inc.Inventors: DelRae H. Gardner, Craig C. Ramsey, Dana L Patelzick
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Publication number: 20100201984Abstract: An in-line particle sensor includes a sensor body, an illumination source, an illumination detector and communication electronics. The sensor body has an electronics enclosure and a flowthrough portion with a fluid inlet, a fluid outlet, a sample interaction region and a fluid path extending through the sample interaction region from the fluid inlet to the fluid outlet. The illumination source is disposed to provide light through at least a portion of the sample interaction region. The illumination detector is disposed to detect illumination variation resulting from illumination impinging at least one particle in the flow path in the sample interaction region. The communication electronics are operably coupled to the illumination detector to provide an indication of the at least one particle sensed by the illumination detector. The sample interaction region is configured to withstand high operating pressure.Type: ApplicationFiled: January 25, 2010Publication date: August 12, 2010Applicant: CYBEROPTICS SEMICONDUCTOR, INC.Inventors: Felix Schuda, DelRae Gardner, Craig C. Ramsey, Dennis J. Bonciolini
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Patent number: 7456977Abstract: A wireless substrate-like sensor is provided to facilitate alignment and calibration of semiconductor processing systems. The wireless substrate-like sensor includes an optical image acquisition system that acquires one or more images of targets placed within the semiconductor processing system. Analysis of images of the targets obtained by the wireless substrate-like sensor provides position and/or orientation information in at least three degrees of freedom. An additional target is affixed to a known location within the semiconductor processing system such that imaging the reference position with the wireless substrate-like sensor allows the measurement and compensation for pick-up errors.Type: GrantFiled: March 15, 2006Date of Patent: November 25, 2008Assignee: CyberOptics Semiconductor, Inc.Inventors: Craig C. Ramsey, Jeffrey K. Lassahn, Greg Huntzinger, DelRae H. Gardner
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Publication number: 20080239314Abstract: A substrate-like particle sensor includes a substrate-like base portion and an electronics enclosure disposed on the substrate-like base portion. A power source is located within the electronics enclosure. A controller is operably coupled to the power source. A particle sensor is operably coupled to the controller and provides an indication to the controller of at least one particle present near the particle sensor.Type: ApplicationFiled: September 27, 2007Publication date: October 2, 2008Inventors: Dennis J. Bonciolini, Craig C. Ramsey, DelRae H. Gardner, Felix J. Schuda
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Publication number: 20080231291Abstract: A sensor for sensing a gap between the sensor and an object of interest within a semiconductor processing chamber is provided. The sensor includes a housing, a power source inside the housing, wireless communication circuitry, a controller, measurement circuitry and a plurality of capacitive plate pairs. The controller and wireless communication circuitry are coupled to each other, and to the power source. The plurality of capacitive plate pairs are configured to form capacitors having a capacitance that varies with the gap. Measurement circuitry is coupled to the controller and to the plurality of capacitive plate pairs. The measurement circuitry is configured to measure the capacitance of the capacitive plate pairs and provide indications thereof to the controller. The controller is configured to provide an indication relative to the gap based, at least in part, upon the measured capacitances.Type: ApplicationFiled: March 26, 2008Publication date: September 25, 2008Inventors: Craig C. Ramsey, DelRae H. Gardner
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Patent number: 7289230Abstract: A wireless substrate-like sensor is provided to facilitate alignment and calibration of semiconductor processing systems. The wireless substrate-like sensor includes an optical image acquisition system that acquires one or more images of targets placed within the semiconductor processing system. Analysis of images of the targets obtained by the wireless substrate-like sensor provides position and/or orientation information in at least three degrees of freedom. An additional target is affixed to a known location within the semiconductor processing system such that imaging the reference position with the wireless substrate-like sensor allows the measurement and compensation for pick-up errors.Type: GrantFiled: January 31, 2003Date of Patent: October 30, 2007Assignee: CyberOptics Semiconductors, Inc.Inventors: Craig C. Ramsey, Jeffrey K. Lassahn, Greg Huntzinger, DelRae H. Gardner
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Patent number: 7283255Abstract: A wireless substrate-like sensor is provided to facilitate alignment and calibration of semiconductor processing systems. The wireless substrate-like sensor includes an optical image acquisition system that acquires one or more images of targets placed within the semiconductor processing system. Analysis of images of the targets obtained by the wireless substrate-like sensor provides position and/or orientation information in at least three degrees of freedom. An additional target is affixed to a known location within the semiconductor processing system such that imaging the reference position with the wireless substrate-like sensor allows the measurement and compensation for pick-up errors.Type: GrantFiled: March 1, 2006Date of Patent: October 16, 2007Assignee: CyberOptics Semiconductor, Inc.Inventors: Craig C. Ramsey, Jeffrey K. Lassahn, Greg Huntzinger, DelRae H. Gardner
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Publication number: 20030223057Abstract: A wireless substrate-like sensor is provided to facilitate alignment and calibration of semiconductor processing systems. The wireless substrate-like sensor includes an optical image acquisition system that acquires one or more images of targets placed within the semiconductor processing system. Analysis of images of the targets obtained by the wireless substrate-like sensor provides position and/or orientation information in at least three degrees of freedom. An additional target is affixed to a known location within the semiconductor processing system such that imaging the reference position with the wireless substrate-like sensor allows the measurement and compensation for pick-up errors.Type: ApplicationFiled: January 31, 2003Publication date: December 4, 2003Inventors: Craig C. Ramsey, Jeffrey K. Lassahn, Greg Huntzinger, DelRae H. Gardner