Patents by Inventor Craig K. Carlson-Stevermer

Craig K. Carlson-Stevermer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer staging platform for a wafer inspection system
    Patent number: 7230441
    Abstract: A wafer staging platform for a wafer inspection system for inspecting of semiconductors or like substrates and method of handling wafers. The platform and related method is designed to reduce the amount of time needed to exchange wafers on a processing tool. The staging platform can include a vacuum-assisted feature. The method of handling includes simultaneously processing a plurality of wafers, during which the staging platform is employed to temporarily store wafer(s) in close proximity to a next in line station.
    Type: Grant
    Filed: July 18, 2003
    Date of Patent: June 12, 2007
    Assignee: Rudolph Technologies, Inc.
    Inventor: Craig K. Carlson-Stevermer
  • Water staging platform
    Publication number: 20040070387
    Abstract: A wafer staging platform for use with equipment such as an inspection system for inspecting of semiconductors or like substrates. The platform is designed to reduce the amount of time needed to exchange wafers on a processing tool.
    Type: Application
    Filed: July 18, 2003
    Publication date: April 15, 2004
    Applicant: August Technology Corp.
    Inventor: Craig K. Carlson-Stevermer