Abstract: A module for a vacuum pumping and/or abatement system includes a top side, a bottom side, a front side, a rear side, and two opposing lateral sides, which together define a space. The module comprises an apparatus located wholly within the space and one or more connection points coupled to the apparatus. Each of the connection points is for receiving an input for the apparatus or receiving an output from the apparatus. The one or more connection points are located at the top side. The module has a maximum size in a first system dimension that is equal to a first integer multiple of a fixed system value, the first system dimension being a dimension between the lateral sides. For each connection point, a distance between that connection point and each lateral side in the first system dimension is a respective second integer multiple of the fixed system value.

Abstract: A vacuum pumping and/or abatement system for evacuating and/or abating fluid from an entity, the system comprising: a first module comprising a vacuum pumping apparatus for pumping the fluid from the entity and/or an abatement apparatus for abating the fluid evacuated from the entity; and a second module arranged adjacent to the first module in a first system dimension; wherein the first and second modules each have a maximum size in the first system dimension that is a respective integer multiple of a common fixed system value.

Abstract: A module for a vacuum pumping and/or abatement system includes a top side, a bottom side, a front side, a rear side, and two opposing lateral sides, which together define a space. The module comprises an apparatus located wholly within the space and one or more connection points coupled to the apparatus. Each of the connection points is for receiving an input for the apparatus or receiving an output from the apparatus. The one or more connection points are located at the top side. The module has a maximum size in a first system dimension that is equal to a first integer multiple of a fixed system value, the first system dimension being a dimension between the lateral sides. For each connection point, a distance between that connection point and each lateral side in the first system dimension is a respective second integer multiple of the fixed system value.

Abstract: A vacuum pumping and/or abatement system for evacuating and/or abating fluid from an entity, the system comprising: a first module comprising a vacuum pumping apparatus for pumping the fluid from the entity and/or an abatement apparatus for abating the fluid evacuated from the entity; and a second module arranged adjacent to the first module in a first system dimension; wherein the first and second modules each have a maximum size in the first system dimension that is a respective integer multiple of a common fixed system value.