Patents by Inventor Craig M. Noah
Craig M. Noah has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 6637475Abstract: A bulk chemical delivery system, comprising: a bulk chemical canister that is connected to at least one manifold box, wherein each manifold box has at least two output lines, wherein each output line connects to a secondary canister. In non-limiting representative example, the bulk chemical canister may have a capacity of 200 liters. Also disclosed are novel manifolds for use in delivering chemicals from canisters and a transportation/containment cart.Type: GrantFiled: July 30, 2002Date of Patent: October 28, 2003Assignee: Advanced Technology Materials, Inc.Inventors: Craig M. Noah, John N. Gregg, Robert M. Jackson, Craig Esser
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Patent number: 6629627Abstract: A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.Type: GrantFiled: January 26, 1998Date of Patent: October 7, 2003Assignee: Advanced Technology Materials, Inc.Inventors: Stephen H. Siegele, Craig M. Noah, John N. Gregg
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Patent number: 6557593Abstract: A highly reliable bulk chemical delivery system for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.Type: GrantFiled: July 16, 2001Date of Patent: May 6, 2003Assignee: Advanced Technology Materials, Inc.Inventors: Stephen H. Siegele, Craig M. Noah, John N. Gregg
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Publication number: 20020189709Abstract: A bulk chemical delivery system, comprising: a bulk chemical canister that is connected to at least one manifold box, wherein each manifold box has at least two output lines, wherein each output line connects to a secondary canister. In non-limiting representative example, the bulk chemical canister may have a capacity of 200 liters. Also disclosed are novel manifolds for use in delivering chemicals from canisters and a transportation/containment cart.Type: ApplicationFiled: July 30, 2002Publication date: December 19, 2002Inventors: Craig M. Noah, John N. Gregg, Robert M. Jackson, Craig Esser
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Patent number: 6457494Abstract: A chemical delivery system which utilizes multiple techniques to achieve a suitable chemical purge of the chemical delivery system is provided. A purge sequence serves to purge the manifold and canister connection lines of the chemical delivery system prior to removal of an empty chemical supply canister or after a new canister is installed. More particularly, a purge technique which may utilizes a variety of combinations of a medium level vacuum source, a hard vacuum source, and/or a liquid flush system is disclosed. By utilizing a plurality of purge techniques, chemicals such as TaEth, TDEAT, BST, etc. which pose purging difficulties may be efficiently purged from the chemical delivery system. The chemical delivery system may also be provided with an efficient and conveniently located heater system for heating the chemical delivery system cabinet.Type: GrantFiled: September 7, 2001Date of Patent: October 1, 2002Assignee: Advanced Technology Materials, Inc.Inventors: John N. Gregg, Craig M. Noah, Robert M. Jackson
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Patent number: 6435229Abstract: A bulk chemical delivery system, comprising: a bulk chemical canister that is connected to at least one manifold box, wherein each manifold box has at least two output lines, wherein each output line connects to a secondary canister. In non-limiting representative example, the bulk chemical canister may have a capacity of 200 liters. Also disclosed are novel manifolds for use in delivering chemicals from canisters and a transportation/containment cart.Type: GrantFiled: September 1, 2000Date of Patent: August 20, 2002Assignee: Advanced Technology Materials, Inc.Inventors: Craig M. Noah, John N. Gregg, Robert M. Jackson, Craig Esser
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Publication number: 20020069930Abstract: A chemical delivery system which utilizes multiple techniques to achieve a suitable chemical purge of the chemical delivery system is provided. A purge sequence serves to purge the manifold and canister connection lines of the chemical delivery system prior to removal of an empty chemical supply canister or after a new canister is installed. More particularly, a purge technique which may utilizes a variety of combinations of a medium level vacuum source, a hard vacuum source, and/or a liquid flush system is disclosed. By utilizing a plurality of purge techniques, chemicals such as TaEth, TDEAT, BST, etc. which pose purging difficulties may be efficiently purged from the chemical delivery system. The chemical delivery system may also be provided with an efficient and conveniently located heater system for heating the chemical delivery system cabinet.Type: ApplicationFiled: September 7, 2001Publication date: June 13, 2002Inventors: John N. Gregg, Craig M. Noah, Robert M. Jackson
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Publication number: 20020038676Abstract: A highly reliable bulk chemical delivery system for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.Type: ApplicationFiled: July 16, 2001Publication date: April 4, 2002Inventors: Stephen H. Siegele, Craig M. Noah, John N. Gregg
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Patent number: 6296025Abstract: A chemical delivery system which utilizes multiple techniques to achieve a suitable chemical purge of the chemical delivery system is provided. A purge sequence serves to purge the manifold and canister connection lines of the chemical delivery system prior to removal of an empty chemical supply canister or after a new canister is installed. More particularly, a purge technique which may utilizes a variety of combinations of a medium level vacuum source, a hard vacuum source, and/or a liquid flush system is disclosed. By utilizing a plurality of purge techniques, chemicals such as TaEth, TDEAT, BST, etc. which pose purging difficulties may be efficiently purged from the chemical delivery system. The chemical delivery system may also be provided with an efficient and conveniently located heater system for heating the chemical delivery system cabinet.Type: GrantFiled: November 13, 2000Date of Patent: October 2, 2001Assignee: Advanced Technology Materials, Inc.Inventors: John N. Gregg, Craig M. Noah, Robert M. Jackson
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Patent number: 6296026Abstract: A chemical delivery system which utilizes multiple techniques to achieve a suitable chemical purge of the chemical delivery system is provided. A purge sequence serves to purge the manifold and canister connection lines of the chemical delivery system prior to removal of an empty chemical supply canister or after a new canister is installed. More particularly, a purge technique which may utilizes a variety of combinations of a medium level vacuum source, a hard vacuum source, and/or a liquid flush system is disclosed. By utilizing a plurality of purge techniques, chemicals such as TaEth, TDEAT, BST, etc. which pose purging difficulties may be efficiently purged from the chemical delivery system. The chemical delivery system may also be provided with an efficient and conveniently located heater system for heating the chemical delivery system cabinet.Type: GrantFiled: November 13, 2000Date of Patent: October 2, 2001Assignee: Advanced Technology Materials, Inc.Inventors: John N. Gregg, Craig M. Noah, Robert M. Jackson
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Patent number: 6260588Abstract: A bulk chemical delivery system, that includes a cabinet that houses a delivery system. The delivery system may include a canister within the cabinet that is connected to a manifold within the cabinet that includes at least one output line for providing chemical from the canister outside the cabinet. The delivery system may further include an input system that provides input for operation of the delivery system, wherein the input system is housed in an enclosure, and an inert gas line that connects and supplies inert gas to the enclosure.Type: GrantFiled: June 8, 1999Date of Patent: July 17, 2001Assignee: Advanced Technology Materials, Inc.Inventors: Craig M. Noah, John N. Gregg, Robert M. Jackson, Craig Esser
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Patent number: 6199599Abstract: A chemical delivery system which utilizes multiple techniques to achieve a suitable chemical purge of the chemical delivery system is provided. A purge sequence serves to purge the manifold and canister connection lines of the chemical delivery system prior to removal of an empty chemical supply canister or after a new canister is installed. More particularly, a purge technique which may utilizes a variety of combinations of a medium level vacuum source, a hard vacuum source, and/or a liquid flush system is disclosed. By utilizing a plurality of purge techniques, chemicals such as TaEth, TDEAT, BST, etc. which pose purging difficulties may be efficiently purged from the chemical delivery system. The chemical delivery system may also be provided with an efficient and conveniently located heater system for heating the chemical delivery system cabinet.Type: GrantFiled: June 4, 1999Date of Patent: March 13, 2001Assignee: Advanced Delivery & Chemical Systems Ltd.Inventors: John N. Gregg, Craig M. Noah, Robert M. Jackson
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Patent number: 6056024Abstract: A bulk chemical delivery system having: a bulk chemical canister that is connected to at least one manifold box, wherein each manifold box has at least two output lines, wherein each output line connects to a secondary canister. The bulk chemical canister may have a capacity of 200 liters.Type: GrantFiled: July 23, 1999Date of Patent: May 2, 2000Assignee: Advanced Delivery & Chemical Systems, Ltd.Inventors: Craig M. Noah, John N. Gregg, Robert M. Jackson, Craig Esser
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Patent number: 6029717Abstract: Containers for ultrahigh purity chemicals having aspect ratios of greater than 3:1 and methods of making the same from seamless electropolished stainless steel tubing are described. Chemical delivery systems for semiconductor fabrication processes that utilize these high aspect ratio containers also are described.Type: GrantFiled: November 29, 1996Date of Patent: February 29, 2000Assignee: Advanced Delivery & Chemical Systems, Ltd.Inventors: Stephen H. Siegele, John N. Gregg, Craig M. Noah
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Patent number: 5950693Abstract: A bulk chemical delivery system, having a bulk chemical canister that is connected to at least one manifold box, wherein each manifold box has at least two output lines, wherein each output line connects to a secondary canister. The bulk chemical canister may have a capacity of 200 liters. The bulk canister is housed within a transportation and containment cart that is housed within a cabinet.Type: GrantFiled: March 24, 1998Date of Patent: September 14, 1999Assignee: Advanced Delivery & Chemical Systems, Ltd.Inventors: Craig M. Noah, John N. Gregg, Robert M. Jackson, Craig Esser
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Patent number: 5878793Abstract: A highly reliable bulk chemical delivery system for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.Type: GrantFiled: March 12, 1997Date of Patent: March 9, 1999Inventors: Stephen H. Siegele, Craig M. Noah, John N. Gregg
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Patent number: 5711354Abstract: A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.Type: GrantFiled: June 7, 1995Date of Patent: January 27, 1998Assignee: Advanced Delivery & Chemical Systems, Inc.Inventors: Stephen H. Siegele, Craig M. Noah, John N. Gregg
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Patent number: 5607002Abstract: A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.Type: GrantFiled: November 28, 1994Date of Patent: March 4, 1997Assignee: Advanced Delivery & Chemical Systems, Inc.Inventors: Stephen H. Siegele, Craig M. Noah, John N. Gregg
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Patent number: 5590695Abstract: A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.Type: GrantFiled: June 7, 1995Date of Patent: January 7, 1997Assignee: Advanced Delivery & Chemical Systems, Inc.Inventors: Stephen H. Siegele, Craig M. Noah, John N. Gregg
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Patent number: 5562132Abstract: A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.Type: GrantFiled: June 7, 1995Date of Patent: October 8, 1996Assignee: Advanced Delivery & Chemical Systems, Inc.Inventors: Stephen H. Siegele, Craig M. Noah, John N. Gregg