Abstract: A building houses a semiconductor manufacturing facility, which is circular in shape and is of a multi-story structure. A silo is located at the center for use in storing and transferring wafers to clean rooms disposed radially around the silo at each floor. Human access is not permitted in the silo and in the clean rooms in order to prevent contamination of the wafers. Due to the modularity of the clean room structures, clean rooms can be reconfigured easily without significant impact on the on-going manufacturing operation. The modularity also permits portions of the facility to be deactivated when not needed.

Abstract: An air piloted hydraulic valve positioned between a source of ink jet fluid and a reservoir containing a plurality of orifices through which streams of continuously flowing droplets are emitted for printing, the valve includes an ink chamber into which the source opens, an outlet opening which permits the ink to flow to the reservoir to form the ink jets, and a bypass opening which permits the flow of ink to pass from the inlet to a remote location for either reuse or dumping. A pair of valve seats are disposed on opposite sides of the ink chamber and a pair of valve sealing members are mounted to a valve stem which extends through the ink chamber and the valve seats so that the sealing members are separately engageable with their respective valve seats as the stem is moved back and forth.