Abstract: A sensor may include a substrate defining a flow channel that extends through the substrate, and a plurality of bond pads on the substrate. A first housing may be disposed along the substrate and may permit at least some fluid to flow from a fluid inlet to a fluid outlet along at least part of the flow channel. A second housing may be disposed along the substrate. A sense die may be disposed between the second housing and the substrate and may include a sensing side facing the substrate with a sense element in registration with the flow channel and a plurality of bond pads on the sensing side that are in registration with, and bump bonded to, the plurality of bond pads on the substrate. An adhesive or other material may be disposed between the sensing side of the sense die and the substrate.

Abstract: A sensor may include a substrate defining a flow channel that extends through the substrate, and a plurality of bond pads on the substrate. A first housing may be disposed along the substrate and may permit at least some fluid to flow from a fluid inlet to a fluid outlet along at least part of the flow channel. A second housing may be disposed along the substrate. A sense die may be disposed between the second housing and the substrate and may include a sensing side facing the substrate with a sense element in registration with the flow channel and a plurality of bond pads on the sensing side that are in registration with, and bump bonded to, the plurality of bond pads on the substrate. An adhesive or other material may be disposed between the sensing side of the sense die and the substrate.

Abstract: A combinational sensor system for measuring multiple measurands includes a flow transducer, a pressure transducer and a humidity transducer. The pressure and humidity transducers are provided with independent access to sensed media and are ratiometric to a supply voltage, whereas the flow sensor is sensitive to openings to the flow path. The combinational sensor system utilizes elastomeric seals that include patterned electrically conductive and non-conductive seals. An ASIC is generally associated with the combinational sensor, and is located on a patterned electrically conductive substrate lead frame or for signal conditioning in order to detect any of the sensed measurands. The transducers can be arranged in a manner that distributes the transducers to optimize the accuracy and response time of the combinational sensor system.

Abstract: A packing method and system for measuring multiple measurands including bi-directional flow comprises of sampling ports arranged within a flow tube in a symmetrical pattern. The ports are arranged symmetrically with respect to the X and Y centerlines of the flow tube. In addition, the ports are also arranged symmetrical to the restrictor to minimize the amount of turbulent flow within the flow tube.

Abstract: A combinational sensor system for measuring multiple measurands includes a flow transducer, a pressure transducer and a humidity transducer. The pressure and humidity transducers are provided with independent access to sensed media and are ratiometric to a supply voltage, whereas the flow sensor is sensitive to openings to the flow path. The combinational sensor system utilizes elastomeric seals that include patterned electrically conductive and non-conductive seals. An ASIC is generally associated with the combinational sensor, and is located on a patterned electrically conductive substrate lead frame or for signal conditioning in order to detect any of the sensed measurands. The transducers can be arranged in a manner that distributes the transducers to optimize the accuracy and response time of the combinational sensor system.

Abstract: A mass airflow sensor is disclosed that includes a heating element comprising an upstream side and a downstream side. Two resistive temperature sensors are placed on each side of the heating element and assuming mass air/liquid flows in a direction from left to right. The resistors are configured electrically in a Wheatstone bridge configuration. A regulated voltage is applied across the mass flow sensing, Wheatstone bridge. The regulated voltage is set high enough to produce self-heating effects on the sensing bridge. The central heating element will also be heated. As mass air/liquid flows across the temperature sensors and the heating element, the upstream (RU1 and RU2) resistors are cooled and the downstream (RD1 and RD2) resistors are heated. The resistance in the resistive temperature sensors changes with temperature creating a differential voltage signal proportional to the regulated voltage applied to the sensing Wheatstone bridge and rate of mass air/liquid flow.

Abstract: A packing method and system for measuring multiple measurands including bi-directional flow comprises of sampling ports arranged within a flow tube in a symmetrical pattern. The ports are arranged symmetrically with respect to the X and Y centerlines of the flow tube. In addition, the ports are also arranged symmetrical to the restrictor to minimize the amount of turbulent flow within the flow tube.

Abstract: A modular sensor system includes a plurality of varying types of sensors that provide multiple sensing measurands for sensing operations. A housing is generally associated with the varying types of sensors, such that the housing introduces media to be sensed by the sensors. An electrical interface can also be connected to the sensors, wherein the electrical interface permits a logical physical connection to be made to a selected sensor in order to maximize sensing sensitivity and provide a sensing repeatability and accurate sensor compensation thereof for the sensing operations.