Abstract: A method for reactive sputter coating in a chamber in which large substrates to be coated are transported past one or more coating stations. The stations are comprised of at least one sputtering target and at least one adjacent plasma generator. In the practice of this invention the sputtering and reaction zones within the chamber are indistinguishable.

Abstract: A substantially transparent wear resistant member wherein a dielectric layer is coated on a support such as glass. Wear resistance is enhanced by reducing fine-scale surface roughness of the dielectric layer.

Abstract: A susceptor for heating a food substance in a microwave oven is disclosed which has a thin film of metal deposited on a dimensionally stable dielectric substrate, such as paper. Substrate having a rough surface may be used. Preferably, the susceptor has a complex impedance measured prior to heating, at the frequency of the microwave oven, which has a real part between 30 and 2000 ohms per square. The preferred thickness of the thin metal film is related to the smoothness of the paper substrate. A substrate having a surface smoothness, expressed as an arithmetic average roughness, greater than 0.5 microns may be used with the present invention. The metal film is preferably aluminum having a thickness between 50 Angstroms and 600 Angstroms. The substrate may be coated with coatings such as clay. Clay coated paper substrates having a thin film of metal deposited thereon exhibit improved stability of performance characteristics during microwave heating.