Abstract: An optical component for a broadband radiation source device, the optical component configured for generating a broadband output upon receiving pump radiation and including: a hollow-core photonic crystal fiber (HC-PCF); and a gas mixture filling the HC-PCF, wherein the gas mixture includes a mixture of at least one first gas configured for the generation of the broadband radiation and at least one second gas including or consisting of helium.

Abstract: A method of processing an out-coupling end of a hollow core fiber including a plurality of anti-resonance elements surrounding a hollow core, and a hollow core fiber having been so processed. The method may include performing a tapering step to form a taper in the anti-resonance elements; performing a cleaving step at the taper to form at least one tapered out-coupling end of the hollow core fiber; and performing an end processing step including further heating the out-coupling end in a controlled manner to smoothen the out-coupling end.

Abstract: An optical component for a broadband radiation source device, the optical component configured for generating a broadband output upon receiving pump radiation and including: a hollow-core photonic crystal fiber (HC-PCF); and a gas mixture filling the HC-PCF, wherein the gas mixture includes a mixture of at least one first gas configured for the generation of the broadband radiation and at least one second gas including or consisting of helium.

Abstract: A radiation source for a lithographic apparatus, in particular a laser-produced plasma source includes a fan unit surrounding but not obstructing the collected radiation beam that is operated to generate a flow in a buffer gas away from the optical axis. The fan unit can include a plurality of flat or curved blades generally parallel to the optical axis and driven to rotate about the optical axis.

Abstract: A radiation source for a lithographic apparatus, in particular a laser-produced plasma source includes a fan unit surrounding but not obstructing the collected radiation beam that is operated to generate a flow in a buffer gas away from the optical axis. The fan unit can include a plurality of flat or curved blades generally parallel to the optical axis and driven to rotate about the optical axis.

Abstract: According to an aspect of the present invention, a device for fragmenting molecules in a sample by ultrasound is provided. The device comprises a planar-shaped cartridge and a fragmentation instrument that has a vessel-like shape. By means of applying under-pressure in the fragmentation instrument the cartridge is pulled towards the fragmentation instrument and therefore spatially closes a fluid compartment that is comprised by the fragmentation instrument. Afterwards, an ultrasound treatment of the sample, which is comprised in a sample compartment of the cartridge, may be processed. A sealing layer is provided in between the cartridge and the fragmentation instrument in order to hold the fixation of the cartridge tightly and in order to provide for leakage prevention out of the fluid compartment.

Abstract: According to an aspect of the present invention, a device for fragmenting molecules in a sample by ultrasound is provided. The device comprises a planar-shaped cartridge and a fragmentation instrument that has a vessel-like shape. By means of applying under-pressure in the fragmentation instrument the cartridge is pulled towards the fragmentation instrument and therefore spatially closes a fluid compartment that is comprised by the fragmentation instrument. Afterwards, an ultrasound treatment of the sample, which is comprised in a sample compartment of the cartridge, may be processed. A sealing layer is provided in between the cartridge and the fragmentation instrument in order to hold the fixation of the cartridge tightly and in order to provide for leakage prevention out of the fluid compartment.

Abstract: The present invention relates to a microfluidic device and a corresponding method for pumping of high conductivity liquids comprising: —a microfluidic channel (26; 80; 101) for containing an electrically conductive liquid, in particular a liquid having a high conductivity, —at least two electric field electrodes (21, 22; 71, 72; 91, 92) for generating electric fields, —at least one magnetic field electrode (21, 22; 75, 76; 93, 94) for generating a magnetic field in a direction substantially perpendicular to said electric fields, —a voltage source (23; 74; 95) for providing electric potentials to said at least two electric field electrodes (21, 22; 71, 72; 91, 92) for generating said electric fields, —a current source (23; 78, 79; 96, 97) for providing an electric current to said at least two magnetic field electrodes (21, 22; 75, 76; 93, 94) for generating said magnetic field, wherein said voltage source (23; 74; 95) and said current source (23; 78, 79; 96, 97) are adapted to simultaneously provide said elect