Abstract: Embodiments relate generally to systems, devices, and methods for depositing an electrode and an electrolyte on a microelectromechanical system (MEMS) electrochemical sensor. A method may comprise providing a blade on a surface of a substrate; providing a ridge along the perimeter of the substrate; pressing the electrode and the electrolyte onto the blade and the ridge; cutting the electrode into multiple electrodes; positioning the electrolyte to contact the surface, the blade, and the ridge; and positioning the multiple electrodes to contact the surface, the blade, and the ridge.

Abstract: Apparatus and associated methods relate to a micro-electro-mechanical system (MEMS) based gas sensor including an electrolyte contacting one or more top electrode(s) arranged on the bottom surface of a top semiconductor substrate (TSS), and one or more bottom electrode(s) arranged on the top of a bottom semiconductor substrate (BSS), the TSS and BSS joined with an adhesive seal around the electrolyte, the sensor including one or more capillaries providing gaseous communication to the electrolyte from an external ambient environment. The electrodes may be electrically accessed by one or more vias to externally accessible bond pads. In some examples, an electrical connection may be made from an additional bond pad on top of the TSS to the electrolyte. Various embodiments may reduce the size of various gas sensors to advantageously allow their inclusion into portable electronic devices.

Abstract: A method and apparatus are provided to determine the composition of one or more gases. In the context of a method, a sensory assembly and at least one processor, the sensor assembly comprising a first gas sensor and a second gas sensor, includes causing the first sensor to be powered to detect a presence of one or more gas while the second sensor is unpowered. The method further includes detecting the presence of one or more gases while the second sensor is unpowered. In response to detecting the presence of the one or more gases, the method includes causing the second sensor to be powered. The method still further includes capturing sensor data corresponding to at least one of the one or more gases. The method also includes identifying the at least one of the one or more gases based on an analysis of the sensor data.

Abstract: A method and apparatus are provided to determine the composition of one or more gases. In the context of a method, a sensory assembly and at least one processor, the sensor assembly comprising a first gas sensor and a second gas sensor, includes causing the first sensor to be powered to detect a presence of one or more gas while the second sensor is unpowered. The method further includes detecting the presence of one or more gases while the second sensor is unpowered. in response to detecting the presence of the one or more gases, the method includes causing the second sensor to be powered. The method still further includes capturing sensor data corresponding to at least one of the one or more gases. The method also includes identifying the at least one of the one or more gases based on an analysis of the sensor data.

Abstract: Apparatus and associated methods relate to a micro-electro-mechanical system (MEMS) based gas sensor including an electrolyte contacting one or more top electrode(s) arranged on the bottom surface of a top semiconductor substrate (TSS), and one or more bottom electrode(s) arranged on the top of a bottom semiconductor substrate (BSS), the TSS and BSS joined with an adhesive seal around the electrolyte, the sensor including one or more capillaries providing gaseous communication to the electrolyte from an external ambient environment. The electrodes may be electrically accessed by one or more vias to externally accessible bond pads. In some examples, an electrical connection may be made from an additional bond pad on top of the TSS to the electrolyte. Various embodiments may reduce the size of various gas sensors to advantageously allow their inclusion into portable electronic devices.

Abstract: Embodiments relate generally to systems, devices, and methods for depositing an electrode and an electrolyte on a microelectromechanical system (MEMS) electrochemical sensor. A method may comprise providing a blade on a surface of a substrate; providing a ridge along the perimeter of the substrate; pressing the electrode and the electrolyte onto the blade and the ridge; cutting the electrode into multiple electrodes; positioning the electrolyte to contact the surface, the blade, and the ridge; and positioning the multiple electrodes to contact the surface, the blade, and the ridge.