Patents by Inventor Cristian Wagner

Cristian Wagner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Microlithography projection objective including deformable mirror with adjusting elements and systems and methods using the same
    Patent number: 7294814
    Abstract: A catadioptric projection objective for microlithography has at least one curved mirror that is deformable and adjusting elements that can deform the deformable mirror. The adjusting elements are matched to given image errors and their correction. The invention is suitable for astigmatism, fourfold wavefront-deformations due to lens heating, compaction, and the like.
    Type: Grant
    Filed: September 20, 2006
    Date of Patent: November 13, 2007
    Assignee: Carl Zeiss SMT AG
    Inventors: Cristian Wagner, Michael Gerhard, Gerald Richter
  • Catadioptric projection objective with adaptive mirror and projection exposure method
    Patent number: 7112772
    Abstract: A catadioptric projection objective for microlithography has at least one curved mirror that is deformable and adjusting elements that can deform the deformable mirror. The adjusting elements are matched to given image errors and their correction. The invention is suitable for astigmatism, fourfold wavefront-deformations due to lens heating, compaction, and the like.
    Type: Grant
    Filed: January 17, 2004
    Date of Patent: September 26, 2006
    Assignee: Carl Zeiss SMT AG
    Inventors: Cristian Wagner, Michael Gerhard, Gerald Richter
  • Catadioptric projection objective with adaptive mirror and projection exposure method
    Publication number: 20040144915
    Abstract: A catadioptric projection objective for microlithography has at least one curved mirror that is deformable and adjusting elements that can deform the deformable mirror. The adjusting elements are matched to given image errors and their correction. The invention is suitable for astigmatism, fourfold wavefront-deformations due to lens heating, compaction, and the like.
    Type: Application
    Filed: January 17, 2004
    Publication date: July 29, 2004
    Inventors: Cristian Wagner, Michael Gerhard, Gerald Richter