Patents by Inventor Cung Vuong NGUYEN

Cung Vuong NGUYEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ELECTROSTATIC CLAMP
    Publication number: 20240012341
    Abstract: An electrostatic clamp for holding an object by electrostatic force is disclosed. The electrostatic clamp comprises a dielectric member having a plurality of conductive burls extending from a surface to define a plane in which the object is held, and a conductive element extending between and connecting the plurality of burls. The conductive element is disposed within one or more trenches formed on the surface of the dielectric member. Also disclosed is a method of manufacturing the electrostatic clamp.
    Type: Application
    Filed: October 14, 2021
    Publication date: January 11, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Gustaaf Galein VAN EDEN, Cung Vuong NGUYEN, Ksenia Sergeevna MAKARENKO