Patents by Inventor Curt Rettig

Curt Rettig has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Light-Enhanced Ozone Wafer Processing System and Method of Use
    Publication number: 20220390840
    Abstract: A light-enhanced wafer processing system disclosed herein which includes a rotatable chuck configured to support and selectively rotate at least one wafer, at least one dispenser body configured to selectively flow at least one photolytic material onto a surface of the wafer, and at least one optical radiation source may be configured to provide optical radiation to at least a portion of the wafer having photolytic material applied thereto, wherein the optical radiation is configured to result in the formation of optically-induced radicals having enhanced reactivity with at least one material applied to the wafer.
    Type: Application
    Filed: June 1, 2022
    Publication date: December 8, 2022
    Inventors: Jens Fittkau, Christiane Le Tiec, Curt Rettig, Dirk Nolte, Kay Mittler, Carsten Becher