Patents by Inventor Curtis C. Camus

Curtis C. Camus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for RF power process operations with automatic input power control
    Patent number: 6392210
    Abstract: A variable frequency RF power delivery system is used with a control system that adjusts the output frequency of the RF power delivery system. Frequency adjustments are made so as to maintain the required input current and input voltage within the capabilities of the input current and input voltage source.
    Type: Grant
    Filed: January 24, 2000
    Date of Patent: May 21, 2002
    Inventors: Russell F. Jewett, Curtis C. Camus
  • Methods and apparatus for RF power delivery
    Patent number: 6326584
    Abstract: RF power is delivered to a load in an RF power processor for carrying out process operations. The RF power delivery is performed using a variable frequency RF power amplifier and a control system. The control system maintains RF power delivery using control signals derived from reference RF signals used by the RF power amplifier and measurements of a characteristic of the RF power. The magnitude of the delivered RF power is controlled using measurements of the power input to the RF power amplifier.
    Type: Grant
    Filed: December 31, 1999
    Date of Patent: December 4, 2001
    Assignee: Litmas, Inc.
    Inventors: Russell F. Jewett, Curtis C. Camus
  • Methods and apparatus for igniting and sustaining inductively coupled plasma
    Patent number: 6291938
    Abstract: Plasma processing is carried out in an apparatus having improved stability and reliability for plasma ignition. The improved plasma ignition characteristics result from a modified RF induction coil. One or more nonresonant sections have been added to the RF power induction coil. The nonresonant sections generate enhanced electric fields for igniting the plasma.
    Type: Grant
    Filed: January 24, 2000
    Date of Patent: September 18, 2001
    Assignee: Litmas, Inc.
    Inventors: Russell F. Jewett, Curtis C. Camus