Patents by Inventor Curtis L. Burt

Curtis L. Burt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Silicon epitaxial reactor and control method
    Patent number: 5288364
    Abstract: An epitaxial reactor (10) includes a bell jar (11) wherein epitaxial depositions are performed. During an epitaxial deposition cycle, the temperature of the bell jar (11) is monitored by an infrared detector (22). After the temperature reaches a predetermined value, initiation of further epitaxial deposition cycles is inhibited. The control method extends the useful lifetime of heating lamps (12) and bell jar seals thereby reducing the cost of semiconductor wafers (16).
    Type: Grant
    Filed: August 20, 1992
    Date of Patent: February 22, 1994
    Assignee: Motorola, Inc.
    Inventors: Curtis L. Burt, John W. Steele