Abstract: A method and apparatus for a gas detection system comprises a sample cell containing at least one aperture and a substrate. The substrate comprises a chemiluminescent material that produces photons upon exposure to a fluorine-containing compound. A photo-detector is positioned to receive at least a portion of the photons, wherein the photo-detector generates an electrical output signal relating to a concentration of the fluorine-containing compound.

Abstract: A gaseous fluorine detection system is provided which includes a generally enclosed sample cell containing a substrate comprising a material which interacts with fluorine gas to generate radiant energy. A gas sample of fluorine, the concentration levels of which are to be evaluated is flowed through the cell. A photomultiplier tube is positioned to receive the resulting radiant energy and generate an electrical output signal related to the level of said radiant energy. Means are provided for measuring the said photomultiplier output signal and relating same to the fluorine concentration of the gas sample provided to the cell.