Patents by Inventor Curtis Vass

Curtis Vass has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer out-of-pocket detection method
    Patent number: 6274878
    Abstract: An apparatus and method for monitoring the inclination of a wafer residing within a pocket of a semiconductor processing chamber susceptor. The apparatus of the present invention includes a laser beam source that is positioned to direct a laser beam onto the top surface of a wafer that has been positioned within a susceptor pocket. A laser receiver is positioned to detect the laser beam after it has been reflected off the surface of the wafer. The laser receiver emits an output signal to a visual or audible indicator that indicates whether or not the wafer is properly positioned within the pocket of the susceptor.
    Type: Grant
    Filed: June 6, 2000
    Date of Patent: August 14, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Shih-Hung Li, Curtis Vass
  • Wafer out-of-pocket detector and susceptor leveling tool
    Patent number: 6197117
    Abstract: An apparatus and method for monitoring the level of a semiconductor processing chamber susceptor and the inclination of a wafer residing within a pocket of the susceptor. In one embodiment, a light beam transmitter is positioned to direct a light beam, such as a laser beam, onto the top surface of a wafer that has been positioned within a susceptor pocket. The light beam forms a target spot of a particular size and shape on the surface of the wafer. A camera is positioned to observe the target spot. A change in the angular orientation of the wafer or susceptor will result in a change in the size and shape of the target spot. The camera is configured to detect changes in the target spot size and shape. A logic circuit is provided at the output of the camera to correlate the observed shape and size of the target spot to a value indicative of the levelness of the susceptor and/or the inclination of a wafer located within the pocket of the susceptor.
    Type: Grant
    Filed: July 23, 1997
    Date of Patent: March 6, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Shih-Hung Li, Curtis Vass
  • Wafer out-of-pocket detection tool
    Patent number: 6099596
    Abstract: An apparatus for monitoring the inclination of a wafer residing within a pocket of a semiconductor processing chamber susceptor. The apparatus of the present invention includes a laser beam source that is positioned to direct a laser beam onto the top surface of a wafer that has been positioned within a susceptor pocket. A laser receiver is positioned to detect the laser beam after it has been reflected off the surface of the wafer. The laser receiver emits an output signal to a visual or audible indicator that indicates whether or not the wafer is properly positioned within the pocket of the susceptor.
    Type: Grant
    Filed: July 23, 1997
    Date of Patent: August 8, 2000
    Assignee: Applied Materials, Inc.
    Inventors: Shih-Hung Li, Curtis Vass