Patents by Inventor Curtis W. Doss

Curtis W. Doss has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Stepper with exposure time monitor
    Patent number: 6266132
    Abstract: A method for detecting a degraded light source is provided. An exposure time associated with the light source is monitored. The exposure time is compared to at least one control limit. A degraded condition is identified based on the exposure time violating the control limit. A processing tool includes a stepper and an automatic process controller. The stepper has a light source and is adapted to illuminate a wafer for an exposure time. The automatic process controller is adapted to monitor the exposure time, compare the exposure time to at least one control limit, and identify a degraded condition based on the exposure time violating the control limit.
    Type: Grant
    Filed: September 22, 1999
    Date of Patent: July 24, 2001
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Edward C. Stewart, Curtis W. Doss, Richard D. Edwards