Patents by Inventor Cynthia K. Schauer

Cynthia K. Schauer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20040175948
    Abstract: Chemical mechanical polishing compositions including a carbon dioxide-based solvent, an oxidizing agent, and a chelating agent are formed and used with CMP processes and systems. Methods for determining the endpoint of a CMP process are also provided.
    Type: Application
    Filed: October 10, 2003
    Publication date: September 9, 2004
    Applicant: The University of North Carolina at Chapel Hill
    Inventors: Joseph M. DeSimone, Pamela M. Visintin, Ginger M. Denison, Carol A. Bessel, Cynthia K. Schauer, Stephen Gross