Patents by Inventor Da-Chi Lin

Da-Chi Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7625806
    Abstract: Provided is a method that includes forming a first semiconductor layer on a semiconductor substrate, growing a second semiconductor layer on the first semiconductor layer, forming composite shapes on the first semiconductor layer, each composite shape comprising of an overlying oxide-resistant shape and an underlying second semiconductor shape, with portions of the first semiconductor layer exposed between the composite shapes, forming spacers on sides of the composite shapes, forming buried silicon oxide regions in exposed top portions of the first semiconductor layer, and in portions of the first semiconductor layer located underlying second semiconductor shapes, selectively removing the oxide-resistant shapes and spacers resulting in the second semiconductor shapes, and forming a semiconductor device in a second semiconductor shape wherein a first portion of the semiconductor device overlays the first semiconductor layer and wherein second portions of the semiconductor device overlays a buried silicon oxid
    Type: Grant
    Filed: February 24, 2009
    Date of Patent: December 1, 2009
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Horng-Huei Tseng, Jhy-Chyum Guo, Chenming Hu, Da-Chi Lin
  • Publication number: 20090155965
    Abstract: Provided is a method that includes forming a first semiconductor layer on a semiconductor substrate, growing a second semiconductor layer on the first semiconductor layer, forming composite shapes on the first semiconductor layer, each composite shape comprising of an overlying oxide-resistant shape and an underlying second semiconductor shape, with portions of the first semiconductor layer exposed between the composite shapes, forming spacers on sides of the composite shapes, forming buried silicon oxide regions in exposed top portions of the first semiconductor layer, and in portions of the first semiconductor layer located underlying second semiconductor shapes, selectively removing the oxide-resistant shapes and spacers resulting in the second semiconductor shapes, and forming a semiconductor device in a second semiconductor shape wherein a first portion of the semiconductor device overlays the first semiconductor layer and wherein second portions of the semiconductor device overlays a buried silicon oxid
    Type: Application
    Filed: February 24, 2009
    Publication date: June 18, 2009
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Horng-Huei Tseng, Jhy-Chyum Guo, Chenming Hu, Da-Chi Lin
  • Patent number: 7514730
    Abstract: Provided is a semiconductor transistor device including a substrate having at least two regions, a semiconductive region extending to a first surface of the substrate and an insulative region extending to a second surface of the substrate. The semiconductor transistor device also includes a patterned semiconductor structure overlying both surfaces of the substrate. The patterned semiconductor structure includes a source or drain region overlying the second surface of the substrate. The semiconductor transistor device further includes a patterned gate structure overlying the patterned semiconductor structure.
    Type: Grant
    Filed: January 10, 2005
    Date of Patent: April 7, 2009
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Horng-Huei Tseng, Jhy-Chyum Guo, Chenming Hu, Da-Chi Lin
  • Publication number: 20050156156
    Abstract: Provided is a semiconductor transistor device including a substrate having at least two regions, a semiconductive region extending to a first surface of the substrate and an insulative region extending to a second surface of the substrate. The semiconductor transistor device also includes a patterned semiconductor structure overlying both surfaces of the substrate. The patterned semiconductor structure includes a source or drain region overlying the second surface of the substrate. The semiconductor transistor device further includes a patterned gate structure overlying the patterned semiconductor structure.
    Type: Application
    Filed: January 10, 2005
    Publication date: July 21, 2005
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Horng-Huei Tseng, Jyh-Chyurn Guo, Chenming Hu, Da-Chi Lin
  • Patent number: 6847098
    Abstract: A method of forming a buried silicon oxide region in a semiconductor substrate with portions of the buried silicon oxide region formed underlying portions of a strained silicon shape, and where the strained silicon shape is used to accommodate a semiconductor device, has been developed. A first embodiment of this invention features a buried oxide region formed in a silicon alloy layer, via thermal oxidation procedures. A first portion of the strained silicon layer, protected during the thermal oxidation procedure, overlays the silicon alloy layer while a second portion of the strained silicon layer overlays the buried oxide region. A second embodiment of this invention features an isotropic dry etch procedure used to form an isotropic opening in the silicon alloy layer, with the opening laterally extending under a portion of the strained silicon layer.
    Type: Grant
    Filed: August 14, 2003
    Date of Patent: January 25, 2005
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Horng-Huei Tseng, Jyh-Chyurn Guo, Chenming Hu, Da-Chi Lin
  • Publication number: 20040175907
    Abstract: A new method is provided for the creation of CMOS devices. A sacrificial layer is deposited over a silicon substrate. This sacrificial layer is instrumental in creating gate spacers and in doing so serves to separate the gate from the source/drain regions in a self-aligned manner.
    Type: Application
    Filed: March 7, 2003
    Publication date: September 9, 2004
    Applicant: Taiwan Semiconductor Manfacturing Company
    Inventors: Horng-Huei Tseng, Da-Chi Lin, Kuo-Nan Yang, Chenming Hu
  • Patent number: 6627515
    Abstract: A method of forming a buried silicon oxide region in a semiconductor substrate with portions of the buried silicon oxide region formed underlying portions of a strained silicon shape, and where the strained silicon shape is used to accommodate a semiconductor device, has been developed. A first embodiment of this invention features a buried oxide region formed in a silicon alloy layer, via thermal oxidation procedures. A first portion of the strained silicon layer, protected during the thermal oxidation procedure, overlays the silicon alloy layer while a second portion of the strained silicon layer overlays the buried oxide region. A second embodiment of this invention features an isotropic dry etch procedure used to form an isotropic opening in the silicon alloy layer, with the opening laterally extending under a portion of the strained silicon layer.
    Type: Grant
    Filed: December 13, 2002
    Date of Patent: September 30, 2003
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Horng-Huei Tseng, Jyh-Chyurn Guo, Chenming Hu, Da-Chi Lin