Abstract: Provided is an apparatus for treating a substrate, the apparatus including: an equipment front end module including a first transfer robot for transferring a substrate; a transfer chamber including a second transfer robot for transferring a substrate; and a load lock chamber disposed on a transfer path along which a substrate is transferred between the transfer frame and the transfer chamber, in which the load lock chamber includes: a housing including an upper chamber having an upper space, and a lower chamber positioned below the upper chamber and having a lower space; a first rotational supporter for supporting and rotating a substrate located in the upper space; and a second rotational supporter for supporting and rotating a substrate located in the lower space, and the first rotational supporter and the second rotational supporter are used for both an alignment inspection of a substrate and a vision inspection of a substrate.

Abstract: An apparatus for processing a substrate includes a housing having a processing space therein, a transfer robot that loads the substrate into the processing space or unloads the substrate from the processing space, a support unit including a chuck that supports the substrate in the processing space and a lift pin that moves the substrate in an up-down direction, a dielectric plate having a lower surface disposed to face an upper surface of the chuck, and a gap measurement unit that measures a gap between the dielectric plate and the substrate supported by the lift pin or a gap between the dielectric plate and the chuck.

Abstract: An apparatus for processing a substrate includes a housing having a processing space therein, a transfer robot that loads the substrate into the processing space or unloads the substrate from the processing space, a support unit including a chuck that supports the substrate in the processing space and a lift pin that moves the substrate in an up-down direction, a dielectric plate having a lower surface disposed to face an upper surface of the chuck, and a gap measurement unit that measures a gap between the dielectric plate and the substrate supported by the lift pin or a gap between the dielectric plate and the chuck.