Patents by Inventor Da-Jun Lin
Da-Jun Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240332066Abstract: A semiconductor structure includes a substrate; a first dielectric layer on the substrate; an etch stop layer on the first dielectric layer; a second dielectric layer on the etch stop layer; a first conductor and a second conductor in the second dielectric layer, an air gap in the second dielectric layer and between the first conductor and the second conductor; and a low-polarity dielectric layer on a sidewall surface of the second dielectric layer within the air gap.Type: ApplicationFiled: April 20, 2023Publication date: October 3, 2024Applicant: UNITED MICROELECTRONICS CORP.Inventors: Da-Jun Lin, Chih-Wei Chang, Fu-Yu Tsai, Bin-Siang Tsai
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Patent number: 12108681Abstract: A semiconductor device includes a magnetic tunneling junction (MTJ) on a substrate, a top electrode on the MTJ, a trapping layer in the top electrode for trapping hydrogen, a first inter-metal dielectric (IMD) layer on the MTJ, and a first metal interconnection in the first IMD layer and on the top electrode. Preferably, a top surface of the trapping layer is lower than a bottom surface of the first IMD layer.Type: GrantFiled: October 4, 2023Date of Patent: October 1, 2024Assignee: UNITED MICROELECTRONICS CORP.Inventors: Da-Jun Lin, Tai-Cheng Hou, Bin-Siang Tsai, Ting-An Chien
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Patent number: 12108691Abstract: A memory device and a manufacturing method thereof are provided. The memory device includes a device substrate, a resistance variable layer and a top electrode. The bottom electrode is disposed on the device substrate. The resistance variable layer is disposed on the bottom electrode. The top electrode is disposed on the resistance variable layer. The bottom electrode is formed with a tensile stress, while the top electrode is formed with a compressive stress.Type: GrantFiled: May 26, 2023Date of Patent: October 1, 2024Assignee: United Microelectronics Corp.Inventors: Chich-Neng Chang, Da-Jun Lin, Shih-Wei Su, Fu-Yu Tsai, Bin-Siang Tsai
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Patent number: 12089512Abstract: The invention provides a semiconductor structure, the semiconductor structure includes a substrate, a resistance random access memory on the substrate, an upper electrode, a lower electrode and a resistance conversion layer between the upper electrode and the lower electrode, and a cap layer covering the outer side of the resistance random access memory, the cap layer has an upper half and a lower half, and the upper half and the lower half contain different stresses.Type: GrantFiled: September 6, 2023Date of Patent: September 10, 2024Assignee: UNITED MICROELECTRONICS CORP.Inventors: Shih-Wei Su, Da-Jun Lin, Chih-Wei Chang, Bin-Siang Tsai, Ting-An Chien
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Publication number: 20240290731Abstract: A warpage-reducing semiconductor structure includes a wafer. The wafer includes a front side and a back side. Numerous semiconductor elements are disposed at the front side. A silicon oxide layer is disposed at the back side. A UV-transparent silicon nitride layer covers and contacts the silicon oxide layer. The refractive index of the UV-transparent silicon nitride layer is between 1.55 and 2.10.Type: ApplicationFiled: May 9, 2024Publication date: August 29, 2024Applicant: UNITED MICROELECTRONICS CORP.Inventors: Da-Jun Lin, Chin-Chia Yang, Tai-Cheng Hou, Fu-Yu Tsai, Bin-Siang Tsai
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Patent number: 12069960Abstract: The invention provides a semiconductor structure, the semiconductor structure includes a dielectric layer, a plurality of MTJ stacked elements and at least one dummy MTJ stacked element located in the dielectric layer, a first nitride layer covering at least the sidewalls of the MTJ stacked elements and the dummy MTJ stacked elements, a second nitride layer covering the top surfaces of the dummy MTJ stacked elements, the thickness of the second nitride layer is greater than the thickness of the first nitride layer, and a plurality of contact structures located in the dielectric layer and electrically connected with each MTJ stacked element.Type: GrantFiled: July 15, 2021Date of Patent: August 20, 2024Assignee: UNITED MICROELECTRONICS CORP.Inventors: Da-Jun Lin, Ching-Hua Hsu, Fu-Yu Tsai, Bin-Siang Tsai
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Publication number: 20240243057Abstract: An integrated circuit includes a substrate, an interconnection layer, an insulation layer, a metal bump structure, and a metal-insulator-metal capacitor. The interconnection layer is disposed above the substrate. The interconnection layer includes an interlayer dielectric layer and an interconnection structure disposed in the interlayer dielectric layer. The insulation layer is disposed on the interconnection layer, the metal bump structure is disposed on the insulation layer, and the metal-insulator-metal capacitor is disposed conformally on the metal bump structure and the insulation layer. A manufacturing method of the integrated circuit includes the following steps. The interconnection layer is formed above the substrate. The insulation layer is formed on the interconnection layer, the metal bump structure is formed on the insulation layer, and the metal-insulator-metal capacitor is formed conformally on the metal bump structure and the insulation layer.Type: ApplicationFiled: March 22, 2023Publication date: July 18, 2024Applicant: UNITED MICROELECTRONICS CORP.Inventors: Da-Jun Lin, Bin-Siang Tsai, Fu-Yu Tsai
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Publication number: 20240213304Abstract: An MIM capacitor structure includes numerous inter-metal dielectrics. A trench is embedded within the inter-metal dielectrics. A capacitor is disposed within the trench. The capacitor includes a first electrode layer, a capacitor dielectric layer and a second electrode layer. The first electrode layer, the capacitor dielectric layer and the second electrode layer fill in and surround the trench. The capacitor dielectric layer is between the first electrode layer and the second electrode layer. A silicon oxide liner surrounds a sidewall of the trench and contacts the first electrode layer.Type: ApplicationFiled: February 9, 2023Publication date: June 27, 2024Applicant: UNITED MICROELECTRONICS CORP.Inventors: Da-Jun Lin, Bin-Siang Tsai, Fu-Yu Tsai, Chung-Yi Chiu
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Patent number: 12014995Abstract: A warpage-reducing semiconductor structure includes a wafer. The wafer includes a front side and a back side. Numerous semiconductor elements are disposed at the front side. A silicon oxide layer is disposed at the back side. A UV-transparent silicon nitride layer covers and contacts the silicon oxide layer. The refractive index of the UV-transparent silicon nitride layer is between 1.55 and 2.10.Type: GrantFiled: July 7, 2021Date of Patent: June 18, 2024Assignee: UNITED MICROELECTRONICS CORP.Inventors: Da-Jun Lin, Chin-Chia Yang, Tai-Cheng Hou, Fu-Yu Tsai, Bin-Siang Tsai
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Patent number: 12016250Abstract: An MRAM structure includes a dielectric layer. A first MRAM, a second MRAM and a third MRAM are disposed on the dielectric layer, wherein the second MRAM is disposed between the first MRAM and the third MRAM, and the second MRAM includes an MTJ. Two gaps are respectively disposed between the first MRAM and the second MRAM and between the second MRAM and the third MRAM. Two tensile stress pieces are respectively disposed in each of the two gaps. A first compressive stress layer surrounds and contacts the sidewall of the MTJ entirely. A second compressive stress layer covers the openings of each of the gaps and contacts the two tensile material pieces.Type: GrantFiled: April 20, 2022Date of Patent: June 18, 2024Assignee: UNITED MICROELECTRONICS CORP.Inventors: Da-Jun Lin, Min-Hua Tsai, Tai-Cheng Hou, Fu-Yu Tsai, Bin-Siang Tsai
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Patent number: 12015076Abstract: A high electron mobility transistor includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer. The composition of the first III-V compound layer is different from that of the second III-V compound layer. A trench is disposed within the first III-V compound layer and the second III-V compound layer. The trench has a first corner and a second corner. The first corner and the second corner are disposed in the first III-V compound layer. A first dielectric layer contacts a sidewall of the first corner. A second dielectric layer contacts a sidewall of the second corner. The first dielectric layer and the second dielectric layer are outside of the trench. A gate is disposed in the trench. A source electrode and a drain electrode are respectively disposed at two sides of the gate. A gate electrode is disposed on the gate.Type: GrantFiled: January 3, 2023Date of Patent: June 18, 2024Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chih-Wei Chang, Yao-Hsien Chung, Shih-Wei Su, Hao-Hsuan Chang, Da-Jun Lin, Ting-An Chien, Bin-Siang Tsai
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Publication number: 20240162208Abstract: A structure with a photodiode, an HEMT and an SAW device includes a photodiode and an HEMT. The photodiode includes a first electrode and a second electrode. The first electrode contacts a P-type III-V semiconductor layer. The second electrode contacts an N-type III-V semiconductor layer. The HEMT includes a P-type gate disposed on an active layer. A gate electrode is disposed on the P-type gate. Two source/drain electrodes are respectively disposed at two sides of the P-type gate. Schottky contact is between the first electrode and the P-type III-V semiconductor layer, and between the gate electrode and the P-type gate. Ohmic contact is between the second electrode and the first N-type III-V semiconductor layer, and between one of the two source/drain electrodes and the active layer and between the other one of two source/drain electrodes and the active layer.Type: ApplicationFiled: December 7, 2022Publication date: May 16, 2024Applicant: UNITED MICROELECTRONICS CORP.Inventors: Da-Jun Lin, Chih-Wei Chang, Fu-Yu Tsai, Bin-Siang Tsai, Chung-Yi Chiu
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Publication number: 20240081154Abstract: A method for fabricating a semiconductor device includes the steps of: providing a substrate, wherein the substrate comprises a MRAM region and a logic region; forming a magnetic tunneling junction (MTJ) on the MRAM region; forming a top electrode on the MTJ; and then performing a flowable chemical vapor deposition (FCVD) process to form a first inter-metal dielectric (IMD) layer around the top electrode and the MTJ.Type: ApplicationFiled: November 8, 2023Publication date: March 7, 2024Applicant: UNITED MICROELECTRONICS CORP.Inventors: Tai-Cheng Hou, Fu-Yu Tsai, Bin-Siang Tsai, Da-Jun Lin, Chau-Chung Hou, Wei-Xin Gao
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Publication number: 20240032433Abstract: A semiconductor device includes a magnetic tunneling junction (MTJ) on a substrate, a top electrode on the MTJ, a trapping layer in the top electrode for trapping hydrogen, a first inter-metal dielectric (IMD) layer on the MTJ, and a first metal interconnection in the first IMD layer and on the top electrode. Preferably, a top surface of the trapping layer is lower than a bottom surface of the first IMD layer.Type: ApplicationFiled: October 4, 2023Publication date: January 25, 2024Applicant: UNITED MICROELECTRONICS CORP.Inventors: Da-Jun Lin, Tai-Cheng Hou, Bin-Siang Tsai, Ting-An Chien
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Publication number: 20240014069Abstract: A method for fabricating semiconductor device includes the steps of: forming a dielectric layer on a substrate; forming a trench in the dielectric layer; forming a first liner in the trench, wherein the first liner comprises Co—Ru alloy; forming a metal layer on the first liner; and planarizing the metal layer and the first liner to form a metal interconnection.Type: ApplicationFiled: September 26, 2023Publication date: January 11, 2024Applicant: UNITED MICROELECTRONICS CORP.Inventors: Da-Jun Lin, Bin-Siang Tsai
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Patent number: 11871677Abstract: A method for fabricating a semiconductor device includes the steps of: providing a substrate, wherein the substrate comprises a MRAM region and a logic region; forming a magnetic tunneling junction (MTJ) on the MRAM region; forming a top electrode on the MTJ; and then performing a flowable chemical vapor deposition (FCVD) process to form a first inter-metal dielectric (IMD) layer around the top electrode and the MTJ.Type: GrantFiled: February 22, 2021Date of Patent: January 9, 2024Assignee: UNITED MICROELECTRONICS CORP.Inventors: Tai-Cheng Hou, Fu-Yu Tsai, Bin-Siang Tsai, Da-Jun Lin, Chau-Chung Hou, Wei-Xin Gao
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Publication number: 20230413690Abstract: The invention provides a semiconductor structure, the semiconductor structure includes a substrate, a resistance random access memory on the substrate, an upper electrode, a lower electrode and a resistance conversion layer between the upper electrode and the lower electrode, and a cap layer covering the outer side of the resistance random access memory, the cap layer has an upper half and a lower half, and the upper half and the lower half contain different stresses.Type: ApplicationFiled: September 6, 2023Publication date: December 21, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Shih-Wei Su, Da-Jun Lin, Chih-Wei Chang, Bin-Siang Tsai, Ting-An Chien
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Patent number: 11849649Abstract: A method for fabricating memory cell of magnetoresistive RAM includes forming a memory stack structure on a first electrode layer. The memory stack structure includes a SAF layer to serve as a pinned layer; a magnetic free layer and a barrier layer sandwiched between the SAF layer and the magnetic free layer. A second electrode layer is then formed on the memory stack structure. The SAF layer includes a first magnetic layer, a second magnetic layer, and a spacer layer of a first metal element sandwiched between the first magnetic layer and the second magnetic layer. The first metal element is phase separated from a second metal element of the first and second magnetic layers, and the second metal element of the first magnetic layer and the second magnetic layer interfaces with the spacer layer.Type: GrantFiled: January 12, 2022Date of Patent: December 19, 2023Assignee: United Microelectronics Corp.Inventors: Da-Jun Lin, Bin-Siang Tsai, Ting-An Chien
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Publication number: 20230378313Abstract: A manufacturing method of a semiconductor device includes the following steps. A gate structure is formed on a III-V compound semiconductor layer. A gate silicide layer and a source/drain silicide layer are formed by an anneal process. The gate silicide layer is formed on the gate structure, the source/drain silicide layer is formed on the III-V compound semiconductor layer, and a material composition of the gate silicide layer is different from a material composition of the source/drain silicide layer.Type: ApplicationFiled: June 12, 2022Publication date: November 23, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Da-Jun Lin, Fu-Yu Tsai, Bin-Siang Tsai, Chung-Yi Chiu
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Publication number: 20230377952Abstract: A gallium nitride (GaN) device with field plate structure, including a substrate, a gate on the substrate and a passivation layer covering on the gate, a source and a drain on the substrate and the passivation layer, a stop layer on the source, the drain and the passivation layer, and dual-damascene interconnects connecting respectively with the source and the drain, wherein the dual-damascene interconnect is provided with a via portion under the stop layer and a trench portion on the stop layer, and the via portion is connected with the source or the drain, and the trench portion of one of the dual-damascene interconnects extends horizontally toward the drain and overlaps the gate below in vertical direction, thereby functioning as a field plate structure for the GaN device.Type: ApplicationFiled: June 9, 2022Publication date: November 23, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Da-Jun Lin, Fu-Yu Tsai, Bin-Siang Tsai, Chung-Yi Chiu