Patents by Inventor Da-Som BAE

Da-Som BAE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and equipment for leakage testing of electrostatic chuck
    Patent number: 12566100
    Abstract: The present invention provides a method for leakage testing of an electrostatic chuck. The method for leakage testing of an electrostatic chuck comprises: a mounting step of mounting the electrostatic chuck on a test stage of a testing chamber; a loading step of loading a dummy substrate in an upper surface of the electrostatic chuck; a decompression step of decompressing an interior of the testing chamber; a tracking fluid supply step of supplying a tracking fluid with visibility to a flow path of the electrostatic chuck; a photographing step of photographing the electrostatic chuck; and a determination step of determining whether a leakage occurs in the flow path by examining an image photographed in the photographing step.
    Type: Grant
    Filed: December 28, 2022
    Date of Patent: March 3, 2026
    Assignee: Semes Co., LTD.
    Inventors: Da-Som Bae, Kyeong Hee Kang, Young Ran Ko, Mi Young Jo
  • METHOD AND EQUIPMENT FOR LEAKAGE TESTING OF ELECTROSTATIC CHUCK
    Publication number: 20230204448
    Abstract: The present invention provides a method for leakage testing of an electrostatic chuck. The method for leakage testing of an electrostatic chuck comprises: a mounting step of mounting the electrostatic chuck on a test stage of a testing chamber; a loading step of loading a dummy substrate in an upper surface of the electrostatic chuck; a decompression step of decompressing an interior of the testing chamber; a tracking fluid supply step of supplying a tracking fluid with visibility to a flow path of the electrostatic chuck; a photographing step of photographing the electrostatic chuck; and a determination step of determining whether a leakage occurs in the flow path by examining an image photographed in the photographing step.
    Type: Application
    Filed: December 28, 2022
    Publication date: June 29, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Da-Som BAE, Kyeong Hee KANG, Young Ran KO, Mi Young JO