Abstract: Disclosed is a humidity control system for an EFEM using desiccant includes the equipment front end module (EFEM) including a transfer chamber being a space, in which a processing target object is transferred into a processing module, and a desiccant equipment installed in the EFEM to be separable, and that controls a humidity of the transfer chamber, the desiccant equipment includes a plurality of block bodies coupled to or separated from each other, and being transportable individually, each of the plurality of block bodies accommodates a humidity control equipment, and the humidity control equipment includes: a desiccant rotor including an adsorbent that adsorbs moisture of air that is to be supplied to the transfer chamber, and being rotated by a driving motor, and a regenerative heater that heats the air and causes the heated air to remove the moisture adsorbed to the adsorbent.

Abstract: Disclosed is a humidity control system for an EFEM using desiccant includes the equipment front end module (EFEM) including a transfer chamber being a space, in which a processing target object is transferred into a processing module, and a desiccant equipment installed in the EFEM to be separable, and that controls a humidity of the transfer chamber, the desiccant equipment includes a plurality of block bodies coupled to or separated from each other, and being transportable individually, each of the plurality of block bodies accommodates a humidity control equipment, and the humidity control equipment includes: a desiccant rotor including an adsorbent that adsorbs moisture of air that is to be supplied to the transfer chamber, and being rotated by a driving motor, and a regenerative heater that heats the air and causes the heated air to remove the moisture adsorbed to the adsorbent.