Patents by Inventor Daan Daniel Johannes Antonius VAN SOMMERE

Daan Daniel Johannes Antonius VAN SOMMERE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICES
    Publication number: 20210141312
    Abstract: A substrate holder for use in a lithographic apparatus and configured to support a substrate, the substrate holder including a main body having a main body surface; a plurality of burls projecting from the main body surface to support the substrate spaced apart from the main body surface; and a liquid control structure provided in a peripheral region of the main body surface and configured to cause liquid to preferentially flow toward the periphery of the main body surface.
    Type: Application
    Filed: January 18, 2021
    Publication date: May 13, 2021
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Günes NAKIBOGLU, Coen Hubertus Matheus BALTIS, Siegfried Alexander TROMP, Yuri Johannes Gabriël VAN DE VIJVER, Bert Dirk SCHOLTEN, Daan Daniel Johannes Antonius VAN SOMMERE, Mark Johannes Hermanus FRENCKEN