Abstract: A semiconductor manufacturing apparatus includes a wafer stage, a wafer table including main body supported by the wafer stage and a protrusion protruding from a sidewall of the main body in a first direction, a position module on an upper surface of the wafer table and configured to move in the first direction and a second direction intersecting the first direction, an electrostatic chuck on an upper surface of the position module, a first cable connected to the position module, the first cable extending in the first direction and configured to move the position module in the first direction, a second cable between a bottom surface of the protrusion and a lower wall of the wafer stage, the second cable extending in the second direction and configured to move the position module in the second direction, and a cable connecting member connecting the first cable and the second cable.

Abstract: Provided is a gas baffle, more particularly, a gas baffle for effectively dispersing gas before supplying gas to a substrate through a showerhead in a substrate processing apparatus.

Abstract: Provided is a method of proving ownership and an ownership transfer history using a decentralized identifier (DID). The method includes identifying, by a verifier terminal, a product through a DID and identifying an initial producer of the product through the DID, generating, by the verifier terminal, a proof-of-ownership verifiable credential (VC) of the product, which includes metadata including information on the VC, security information (claims) including information on a belonging, and issuing organization electronic signature information (proof) including a digital signature method and a signature value for content certification of the VC, and providing, by the verifier terminal, the generated proof-of-ownership VC of the product to the producer of the product and storing a DID document of the produced product in a decentralized external storage in a decentralized manner.

Abstract: An ID setting method and system capable of easily setting IDs of a plurality of display units. The ID setting system includes a plurality of display units connected through an input port and an output port to each other, and a control unit that controls assignment of an ID to each of the plurality of display units. Each of the display units compares a present ID to an initial ID, and disables a connection between the output port and an another display unit when the present ID and the initial ID match. Accordingly, a user can easily assign IDs to each of the plurality of display units.

Abstract: An ID setting method and system capable of easily setting IDs of a plurality of display units. The ID setting system includes a plurality of display units connected through an input port and an output port to each other, and a control unit that controls assignment of an ID to each of the plurality of display units. Each of the display units compares a present ID to an initial ID, and disables a connection between the output port and an another display unit when the present ID and the initial ID match. Accordingly, a user can easily assign IDs to each of the plurality of display units.