Patents by Inventor Dae-Hoon Bae

Dae-Hoon Bae has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for manufacturing semiconductor device with stagnated process gas
    Patent number: 6284632
    Abstract: According to the present invention, a process of the present invention is performed with stagnated process gas in a chamber. The process comprises the steps of supplying process gas into a chamber, blocking process gas entry and exit from the chamber so as to stagnate the supplied gas therein, and performing the process. As a result, a process time can be significantly reduced, thereby maximizing yield and reducing the substantial amount of the process gas.
    Type: Grant
    Filed: October 29, 1999
    Date of Patent: September 4, 2001
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Se-Jin Lee, Jae-Chul Lee, Hyun-Bo Shin, Dae-Hoon Bae