Patents by Inventor Dae-oh Ha

Dae-oh Ha has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for manufacturing semiconductor device method for forming HSG-polysilicon layer using same and method for forming capacitor having electrode of HSG-polysilicon layer
    Patent number: 6271134
    Abstract: A semiconductor device manufacturing apparatus, an HSG-polysilicon layer forming method, and a method for forming a capacitor having the HSG-polysilicon layer as an electrode equilibrate the temperature of a processing chamber with a temperature close to that at which a semiconductor manufacturing process occurs. The semiconductor device manufacturing apparatus includes a wafer supporter for holding a wafer during the semiconductor manufacturing process. An elevator moves the wafer supporter vertically among a load/unload position, a standby position above the load/unload position, and a process position above the load/unload position. With this apparatus, processing uniformity is enhanced.
    Type: Grant
    Filed: October 5, 1998
    Date of Patent: August 7, 2001
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dae-oh Ha, Yong-kyun Lim