Patents by Inventor Dae Yub CHO

Dae Yub CHO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Adhesive removing device and method
    Patent number: 11478828
    Abstract: Provided is an adhesive removing device for removing an adhesive for adhering a mask and a pellicle from the mask. The adhesive removing device includes: a laser irradiating unit configured to irradiate a laser beam to an adhesive layer formed between the mask and the pellicle; a controller configured to control a wavelength, a waveform, and an energy density of the laser beam, so as to remove the adhesive layer through emission of the laser beam; and an imaging unit configured to monitor a region to which the laser beam is irradiated.
    Type: Grant
    Filed: August 17, 2016
    Date of Patent: October 25, 2022
    Assignee: EO TECHNICS CO., LTD.
    Inventors: Ill Hyun Park, Dae Yub Cho, Young Jung Kim
  • ADHESIVE REMOVING DEVICE AND METHOD
    Publication number: 20180290182
    Abstract: Provided is an adhesive removing device for removing an adhesive for adhering a mask and a pellicle from the mask. The adhesive removing device includes: a laser irradiating unit configured to irradiate a laser beam to an adhesive layer formed between the mask and the pellicle; a controller configured to control a wavelength, a waveform, and an energy density of the laser beam, so as to remove the adhesive layer through emission of the laser beam; and an imaging unit configured to monitor a region to which the laser beam is irradiated.
    Type: Application
    Filed: August 17, 2016
    Publication date: October 11, 2018
    Applicant: EO TECHNICS CO., LTD.
    Inventors: Ill Hyun PARK, Dae Yub CHO, Young Jung KIM