Patents by Inventor Daeshik Shin

Daeshik Shin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Manufacture of planarized insulating layer
    Patent number: 5665643
    Abstract: A method of manufacturing a semiconductor device having an insulating film includes the steps of: preparing a substrate having a step on a surface thereof; coating polysilazane on the surface of the substrate; and curing the polysilazane in a non-oxidizing atmosphere. Polysilazane coated on a substrate can be cured without corrosion and destruction of underlie wiring patterns.
    Type: Grant
    Filed: July 31, 1995
    Date of Patent: September 9, 1997
    Assignee: Fujitsu Limited
    Inventor: Daeshik Shin