Abstract: A moiré interferometer has an illumination system and an imaging system that share a common focusing optic, which preferably takes the form of a concave mirror. Within the illumination system, the common focusing optic collimates light en route to a test surface. Within the imaging system, the common focusing optic telecentrically images a grating pattern appearing on the test surface onto a fringe pattern detector.

Abstract: A fully automated surface profiling system having a loading chamber and an adjacent measurement chamber containing a phase differential laser optical scanning system and a five-axis positioner having a vacuum chuck for holding and orienting a wafer for surface profile measurement. The positioner can displace a mounted wafer lengthwise and crosswise of the chamber, can rotate the wafer about vertical and horizontal axes through the positioner, and can rotate the wafer about its own axis. Each motion is motor-driven and can be carried out independently of all the others or in compound motion as needed. The positioner can accommodate a series of replaceable chucks for holding wafers of different diameters. The loading chamber has a cassette dock for receiving a cassette containing wafers to be tested, a robotic server, and a prealigner. All operations within the profilometer are controlled by a programmable CPU at a control station.