Patents by Inventor Da-Hae Lee

Da-Hae Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for generating extreme ultraviolet light
    Patent number: 9635749
    Abstract: An apparatus for generating extreme ultraviolet light includes a droplet generator which provides a droplet to react with light from a light source to generate extreme ultraviolet light, a droplet collector which collects the droplet, and a droplet detector which includes a plurality of pressure sensors, the pressure sensors detect a position of the droplet provided to the droplet collecting unit.
    Type: Grant
    Filed: January 14, 2016
    Date of Patent: April 25, 2017
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sung-Joo Kim, Jin-Seok Heo, Do-Hyun Seo, Da-Hae Lee, Jae-Pil Lee, Sung-Jo Hwang
  • APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT
    Publication number: 20160278195
    Abstract: An apparatus for generating extreme ultraviolet light includes a droplet generator which provides a droplet to react with light from a light source to generate extreme ultraviolet light, a droplet collector which collects the droplet, and a droplet detector which includes a plurality of pressure sensors, the pressure sensors detect a position of the droplet provided to the droplet collecting unit.
    Type: Application
    Filed: January 14, 2016
    Publication date: September 22, 2016
    Inventors: Sung-Joo Kim, Jin-Seok Heo, Do-Hyun Seo, Da-Hae Lee, Jae-Pil Lee, Sung-Jo Hwang