Abstract: The disclosure provides a chemical liquid supply apparatus including a chemical liquid storage tank storing a chemical liquid including a plurality of nanorods, a circulation pipe having both ends connected to the chemical liquid storage tank and including a first branch pipe and a second branch pipe, a classifier located at the second branch pipe and including a classification chip and a power supply, and a discharge pipe configured to discharge the chemical liquid to an outside of the circulation pipe, wherein the classification chip collects and releases nanorods of a certain size among the plurality of nanorods, the discharge pipe discharges the nanorods of the certain size to the outside before the nanorods of the certain size released by the classification chip are returned to the chemical liquid storage tank, and the power supply supplies an alternating current to the classification chip.

Abstract: Provided is a chemical storage apparatus including a reservoir including a chemical tank configured to store a chemical, a first fixing member disposed on an upper surface of the chemical tank, and a second fixing member disposed on a lower surface of the chemical tank, a sensor configured to measure a specific parameter of the chemical stored in the reservoir, a receptacle having a space in which the sensor is accommodated, and coupling members for attaching or detaching the receptacle to or from the first fixing member and the second fixing member, respectively.

Abstract: An ink tank for a liquid chemical discharging apparatus configured to prevent equipment failure and improve durability by preventing scattering and backflow of a liquid chemical is described. The ink tank for a liquid chemical discharging apparatus includes: a liquid chemical receiving portion in which a liquid chemical is stored; a liquid chemical discharge port configured to supply the liquid chemical to an inkjet head; a pressure control port configured to control pressure of the liquid chemical receiving portion; and a partition wall provided in the liquid chemical receiving portion and configured to partition the liquid chemical receiving portion.

Abstract: The present invention relates to real time discharging droplet compensating apparatus and method capable of compensating a discharging degree in real time by feeding-back drop information. To this end, the present invention provides a real time discharging droplet compensating apparatus which is configured by including a discharge control unit controlling the driving of an inkjet head; and a drop measurement unit provided below a substrate to measure drop information of a droplet to be discharged on the substrate and feed-back the measured drop information to the drop measurement unit, wherein the discharge control unit compensates a nozzle waveform of discharging the droplet by using the drop information. Therefore, according to the present invention, the position, size, and volume information of the drop are measured at the same time to be fed-back to the inkjet head unit in real time, thereby acquiring drop information without movement of a separate head unit.

Abstract: The present invention relates to real time discharging droplet compensating apparatus and method capable of compensating a discharging degree in real time by feeding-back drop information. To this end, the present invention provides a real time discharging droplet compensating apparatus which is configured by including a discharge control unit controlling the driving of an inkjet head; and a drop measurement unit provided below a substrate to measure drop information of a droplet to be discharged on the substrate and feed-back the measured drop information to the drop measurement unit, wherein the discharge control unit compensates a nozzle waveform of discharging the droplet by using the drop information. Therefore, according to the present invention, the position, size, and volume information of the drop are measured at the same time to be fed-back to the inkjet head unit in real time, thereby acquiring drop information without movement of a separate head unit.

Abstract: An ink tank for a liquid chemical discharging apparatus capable of preventing equipment failure and improving durability by preventing scattering and backflow of a liquid chemical. To this end, the present invention provides an ink tank for a liquid chemical discharging apparatus including: a liquid chemical receiving portion in which a liquid chemical is stored; a liquid chemical discharge port supplying the liquid chemical to an inkjet head; a pressure control port for controlling pressure of the liquid chemical receiving portion; and a partition wall which is provided in the liquid chemical receiving portion to partition the liquid chemical receiving portion. According to the present invention, it is possible to prevent contamination due to a liquid chemical by suppressing the liquid chemical from sloshing and improve durability of an ink tank by preventing the liquid chemical contained therein from flowing backward out of the ink tank.

Abstract: The present invention relates to a sample extracting device and a residual solvent measuring apparatus including the same. The a residual solvent measuring apparatus of the present invention includes a sample extracting device moving on a substrate to extract a solidified sample in a liquid state on the substrate and a component analyzing unit analyzing components of the extracted sample, wherein the sample extracting device includes a coating unit coating a liquid chemical for dissolving the solidified sample on the substrate and a recovering unit recovering the liquid chemical in which the sample is dissolved on the substrate.