Abstract: Disclosed is an electron beam generation source including: an electron discharge part extending on a desired axis and configured to discharge electrons; a support part electrically connected to a power supply device that supplies electric power to the electron discharge part; a tension holding part connected between one end of the electron discharge part and the support part and configured to hold tension of the electron discharge part with a pressing force or a tensile force; and a power supply path part having one end electrically connected to the support part and the other end electrically connected to the one end of the electron discharge part. An electric resistance value of the tension holding part is larger than an electric resistance value of the power supply path part.

Abstract: Disclosed is an electron beam generation source including: an electron discharge part extending on a desired axis and configured to discharge electrons; a movable part connected to one end of the electron discharge part; a support part configured to support the movable part to be movable along the axis; and a tension holding part configured to hold tension of the electron discharge part by applying a pressing force or a tensile force to the movable part. The movable part and the tension holding part are disposed on the axis.

Abstract: Disclosed is an energy beam emission device including: an electron discharge unit having a long electron discharge part; a housing having a window from which energy beams are emitted on the basis of electrons discharged from the electron discharge part; and a unit accommodation part capable of accommodating the electron discharge unit. A plurality of positioning parts are provided between an outer surface of the electron discharge unit and an inner surface of the unit accommodation part, the positioning parts being slidably in contact with an outer surface of the electron discharge unit or an inner surface of the unit accommodation part and performing positioning of the electron discharge part with respect to the unit accommodation part.