Abstract: A substrate processing apparatus management system includes an information analysis device including a model generator that generates a representative model representing correlations in regard to a plurality of processing information pieces representing operations or states relating to a substrate process in a representative chamber among a plurality of chambers, and an assistance device that acquires a plurality of processing information pieces for each of the plurality of chambers, and generates assistance information relating to a maintenance work for another chamber based on comparison information in which correlations in regard to a plurality of processing information pieces for the other chamber are compared with a representative model.

Abstract: A plurality of processing information pieces representing operations or states relating to a process for a substrate are collected from each of a plurality of substrate processing apparatuses. In regard to each substrate processing apparatus, a degree of abnormality of the substrate processing apparatus is calculated as an abnormality score based on a plurality of processing information pieces collected from the substrate processing apparatus and invariant relationships in regard to a plurality of processing information pieces. A management device accepts an inspection request in regard to an abnormality transmitted from each substrate processing apparatus. When two or more inspection requests are accepted, the abnormality scores of the substrate processing apparatuses corresponding to these inspection requests are acquired.

Abstract: An automatic analyzer is provided which is easier to investigate when some troubles such as data abnormality occur in a sample analysis result as compared with an automatic analyzer according to the related art. The automatic analyzer includes: analysis units that perform analysis and quality control analysis for ensuring quality of the analysis; a storage medium that stores quality control results of the quality control analysis performed by the analysis units; a monitor that displays the quality control results; and a control PC that controls an operation of the analysis units (8, 9, and 16), executes, when an arbitrary result is selected from the quality control results stored in the storage medium, based on the selected quality control result, statistical calculation of the selected result and a quality control result performed in the past, and causes the monitor to display a statistical calculation screen as a statistical calculation result.

Abstract: A processing condition specifying method that includes Steps S31, S32, and S33. In Step S31, a prediction thickness information piece containing prediction values of thicknesses after processing on the substrate W is calculated for each of a plurality of recipe information pieces based on measurement thickness information containing measurement values of thicknesses of the substrate W. In Step S32, the prediction thickness information pieces each calculated for a corresponding one of the recipe information pieces are evaluated according to a prescribed evaluation method and a prediction thickness information piece is selected from among the prediction thickness information pieces. In Step S33, a recipe information piece corresponding to the selected prediction thickness information piece is specified. The measurement values contained in the measurement thickness information indicate a thickness of the substrate W measured before processing on the substrate W.

Abstract: An automatic analyzer is provided which is easier to investigate when some troubles such as data abnormality occur in a sample analysis result as compared with an automatic analyzer according to the related art. The automatic analyzer includes: analysis units that perform analysis and quality control analysis for ensuring quality of the analysis; a storage medium that stores quality control results of the quality control analysis performed by the analysis units; a monitor that displays the quality control results; and a control PC that controls an operation of the analysis units (8, 9, and 16), executes, when an arbitrary result is selected from the quality control results stored in the storage medium, based on the selected quality control result, statistical calculation of the selected result and a quality control result performed in the past, and causes the monitor to display a statistical calculation screen as a statistical calculation result.