Patents by Inventor Daichi Maekawa

Daichi Maekawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam device and method for controlling sample stage
    Patent number: 11495432
    Abstract: In a charged particle beam device, a control unit performs processing for: operating a deflector based on movement information to move a visual field of a deflector from a first visual field to a second visual field; capturing the sample image with the second visual field to obtain a reference image; operating the deflector to move the visual field from the second visual field to the first visual field; operating the sample stage based on the movement information to move the visual field from the first visual field to a third visual field; capturing the sample image with the third visual field to obtain a comparison image; calculating a positional deviation amount between the reference image and the comparison image; determining whether the positional deviation amount is equal to or less than a designated positional deviation amount; and operating the sample stage based on the positional deviation amount.
    Type: Grant
    Filed: July 21, 2021
    Date of Patent: November 8, 2022
    Assignee: JEOL Ltd.
    Inventors: Daichi Maekawa, Hitoshi Sakurai
  • Charged Particle Beam Device and Method for Controlling Sample Stage
    Publication number: 20220037110
    Abstract: In a charged particle beam device, a control unit performs processing for: operating a deflector based on movement information to move a visual field of a deflector from a first visual field to a second visual field; capturing the sample image with the second visual field to obtain a reference image; operating the deflector to move the visual field from the second visual field to the first visual field; operating the sample stage based on the movement information to move the visual field from the first visual field to a third visual field; capturing the sample image with the third visual field to obtain a comparison image; calculating a positional deviation amount between the reference image and the comparison image; determining whether the positional deviation amount is equal to or less than a designated positional deviation amount; and operating the sample stage based on the positional deviation amount.
    Type: Application
    Filed: July 21, 2021
    Publication date: February 3, 2022
    Inventors: Daichi Maekawa, Hitoshi Sakurai