Abstract: A laser microscope or a color laser microscope in which a high-resolution image of a sample can be taken without using an acoustic optical element. A rectilinear light beam generating device is used for converting a laser beam into an incoherent rectilinear light beam diverging in a certain direction. Specifically, a laser beam emitted from laser source(s) is converted into an incoherent rectilinear light beam diverging in a certain direction by the rectilinear light beam generating device, and the rectilinear light beam is projected on a sample via a beam deflecting device so as to scan a surface of the sample. The beam reflected from the sample is received by a linear image sensor etc. so as to generate a video signal. As the rectilinear light beam generating device, a micromirror device in which micromirror elements are arranged in a two-dimensional array shape is used.

Abstract: A laser microscope or a color laser microscope in which a high-resolution image of a sample can be taken without using an acoustic optical element. A rectilinear light beam generating device is used for converting a laser beam into an incoherent rectilinear light beam diverging in a certain direction. Specifically, a laser beam emitted from laser source(s) is converted into an incoherent rectilinear light beam diverging in a certain direction by the rectilinear light beam generating device, and the rectilinear light beam is projected on a sample via a beam deflecting device so as to scan a surface of the sample. The beam reflected from the sample is received by a linear image sensor etc. so as to generate a video signal. As the rectilinear light beam generating device, a micromirror device in which micromirror elements are arranged in a two-dimensional array shape is used.

Abstract: A laser microscope is provided, which is low in manufacturing costs and compact in structure. A laser beam emitted from a semiconductor laser is converted into a rectilinear light beam which has divergence in one direction by use of a micromirror device. The micromirror device comprises a plurality of micromirrors arranged in a two-dimensional array, and each micromirror is vibrated at a high speed by a driving pulse. Since each micromirror is movably supported by a hinge, a mirror layer of the micromirror is displaced in a curved manner by the electrostatic attractive force caused by the driving pulse. By this curved displacement of the mirror layer, each micromirror operates as a cylindrical mirror to convert an incident laser beam into an incoherent light beam which diverges in one direction. The rectilinear beam is projected to a sample through a beam deflection device and an objective lens, and a reflected light from the sample is made incident on a linear image sensor.

Abstract: A laser microscope is provided, which is low in manufacturing costs and compact in structure. A laser beam emitted from a semiconductor laser is converted into a rectilinear light beam which has divergence in one direction by use of a micromirror device. The micromirror device comprises a plurality of micromirrors arranged in a two-dimensional array, and each micromirror is vibrated at a high speed by a driving pulse. Since each micromirror is movably supported by a hinge, a mirror layer of the micromirror is displaced in a curved manner by the electrostatic attractive force caused by the driving pulse. By this curved displacement of the mirror layer, each micromirror operates as a cylindrical mirror to convert an incident laser beam into an incoherent light beam which diverges in one direction. The rectilinear beam is projected to a sample through a beam deflection device and an objective lens, and a reflected light from the sample is made incident on a linear image sensor.

Abstract: An image pick-up apparatus including a laser light source for emitting a laser beam, an acoustic-optical element for deflecting the laser beam in a main-scanning direction at a horizontal scanning frequency, a vibrating mirror for deflecting the laser beam deflected in the main-scanning direction in a sub-scanning direction perpendicular to the main-scanning direction at a vertical scanning frequency, an objective lens for projecting the laser beam deflected two-dimensionally onto a specimen as a fine spot, collecting a light flux reflected by the specimen, and directing the collected light flux onto the vibrating mirror, and a linear image sensor for receiving the light beam reflected by the vibrating mirror and having a number of photoelectric converting elements aligned linearly in the main-scanning direction. The linear image sensor is readout at the horizontal scanning frequency to derive an image signal.

Abstract: An apparatus for detecting defects in patterns, particularly defects in chip patterns of photomasks for use in manufacturing semiconductor integrated circuits comprising optically scanning means for scanning in a raster scan mode identical portions of the two patterns to be compared with each other by means of a pair of lens systems to produce a pair of picture signals each corresponding to a respective one of the scanned pattern portions and a defect signal producing means for receiving said pair of picture signals and producing a defect signal as a difference between the two picture signals. A variable delay circuit is provided between the optically scanning means and defect signal producing means to correct or compensate for deviations in the two picture signals due to differences in optical characteristics between the two lens system such as distortion and magnification. The variable delay circuit delays the picture signals for a delay time which is varied as a function of a position on the raster.

Abstract: An apparatus for detecting defects in patterns, particularly defects in chip patterns of photomasks for use in manufacturing semiconductor integrated circuits comprising an optically scanning means for scanning identical portions of the two patterns to be compared with each other with a pair of scanning light spots to produce a pair of picture signals each corresponding to a respective one of the scanned pattern portions; and a defect detecting section for receiving said pair of picture signals and producing a defect signal as a difference between the two picture signals.

Abstract: A system for checking the printed condition of a stack of multicolor printed sheets in which at least one corner of each of the sheets has a check mark including stripes corresponding to each color printed. A counting machine separates the sheets one by one and exposes the corner having the check mark so that a density signal generator can scan the mark by means of a photoelectric element by detecting reflected light therefrom produced by a strobe flash synchronized with the separating operation. The resulting density signal output is analyzed and processed by a density signal processor which generates a pulse output indicating the respective positions of the check mark stripes. A computer operates to inspect for presence of the pulse signal from the density signal processor and any time lag thereof to thereby detect missing print and shear in printing, respectively. The system output then indicates the sheet having the faulty print.

Abstract: An apparatus for detecting defects in patterns, particularly defects in chip patterns of photomasks used for manufacturing semi-conductor integrated circuits comprises means such as a flying spot scanner for producing a scanning light spot, an optical system for projecting said scanning light spot simultaneously on to identical portions of two patterns to be compared with each other, said patterns being placed on a carrier stage, first and second photoelectric converters, each converter receiving the light spot passing through or reflected from a respective pattern to produce an output electrical signal; and an electric circuit for receiving the output signals from said first and second photoelectric converters and subtracting one of them from the other to produce a difference signal which represents detected defects in the patterns.

Abstract: An apparatus for automatically adjusting a microscope in focus, said microscope comprising a stage on which a specimen is to be placed, an objective, an objective tube and a driving member for relatively moving said stage and objective tube. Said apparatus comprises a nozzle member mechanically coupled to said objective tube and being opposed to the specimen, said nozzle being connected to an air pump so as to blow or suck an air stream from said nozzle member, a pressure detector for detecting pressure variations of said air stream to produce an electric signal which varies as a function of a distance between said objective and specimen and an electric motor energized with a signal related to said electric signal and mechanically coupled to said driving member of the microscope.