Patents by Inventor Daisuke HIBINO

Daisuke HIBINO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pattern-measuring apparatus and semiconductor-measuring system
    Patent number: 10445875
    Abstract: A pattern-measuring apparatus and a semiconductor-measuring system are provided which are able to obtain an evaluation result for suitably selecting processing with respect to a semiconductor device. In particular, there is proposed a pattern-measuring apparatus including an arithmetic device which compares a circuit pattern of an electronic device with a reference pattern, in which the arithmetic device classifies the circuit pattern in processing unit of the circuit pattern on the basis of a comparison of a measurement result between the circuit pattern and the reference pattern with at least two threshold values.
    Type: Grant
    Filed: April 27, 2018
    Date of Patent: October 15, 2019
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Yasutaka Toyoda, Norio Hasegawa, Takeshi Kato, Hitoshi Sugahara, Yutaka Hojo, Daisuke Hibino, Hiroyuki Shindo
  • Pattern-Measuring Apparatus and Semiconductor-Measuring System
    Publication number: 20180247400
    Abstract: A pattern-measuring apparatus and a semiconductor-measuring system are provided which are able to obtain an evaluation result for suitably selecting processing with respect to a semiconductor device. In particular, there is proposed a pattern-measuring apparatus including an arithmetic device which compares a circuit pattern of an electronic device with a reference pattern, in which the arithmetic device classifies the circuit pattern in processing unit of the circuit pattern on the basis of a comparison of a measurement result between the circuit pattern and the reference pattern with at least two threshold values.
    Type: Application
    Filed: April 27, 2018
    Publication date: August 30, 2018
    Inventors: Yasutaka TOYODA, Norio HASEGAWA, Takeshi KATO, Hitoshi SUGAHARA, Yutaka HOJO, Daisuke HIBINO, Hiroyuki SHINDO
  • Pattern-measuring apparatus and semiconductor-measuring system
    Patent number: 9990708
    Abstract: An object of the present invention is to provide a pattern-measuring apparatus and a semiconductor-measuring system which are able to obtain an evaluation result for suitably selecting processing with respect to a semiconductor device. In the present invention for attaining the object described above, there is proposed a pattern-measuring apparatus including an arithmetic device which compares a circuit pattern of an electronic device with a reference pattern, in which the arithmetic device classifies the circuit pattern in processing unit of the circuit pattern on the basis of a comparison of a measurement result between the circuit pattern and the reference pattern with at least two threshold values.
    Type: Grant
    Filed: February 5, 2014
    Date of Patent: June 5, 2018
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Yasutaka Toyoda, Norio Hasegawa, Takeshi Kato, Hitoshi Sugahara, Yutaka Hojo, Daisuke Hibino, Hiroyuki Shindo
  • Pattern-Measuring Apparatus and Semiconductor-Measuring System
    Publication number: 20160005157
    Abstract: An object of the present invention is to provide a pattern-measuring apparatus and a semiconductor-measuring system which are able to obtain an evaluation result for suitably selecting processing with respect to a semiconductor device. In the present invention for attaining the object described above, there is proposed a pattern-measuring apparatus including an arithmetic device which compares a circuit pattern of an electronic device with a reference pattern, in which the arithmetic device classifies the circuit pattern in processing unit of the circuit pattern on the basis of a comparison of a measurement result between the circuit pattern and the reference pattern with at least two threshold values.
    Type: Application
    Filed: February 5, 2014
    Publication date: January 7, 2016
    Inventors: Yasutaka TOYODA, Norio HASEGAWA, Takeshi KATO, Hitoshi SUGAHARA, Yutaka HOJO, Daisuke HIBINO, Hiroyuki SHINDO