Patents by Inventor Daisuke HIGASHITARUMIZU

Daisuke HIGASHITARUMIZU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240312821
    Abstract: An automatic teaching apparatus for semiconductor manufacturing equipment includes: an equipment front end module (EFEM); one or more load ports provided along an edge of one side of the EFEM to be connected to an inside of the EFEM; a transfer robot disposed in the inside of the EFEM and configured to transfer a wafer to the one or more load ports by an end effector to process the wafer, and a load port teaching unit configured to detect a fixed position of the end effector in a state of unloading the wafer such that the wafer is placed in the fixed position within the load port.
    Type: Application
    Filed: May 22, 2024
    Publication date: September 19, 2024
    Inventors: Jung-ho YUN, Yonggu KANG, Mid Uem RYU, Hiroki SANEMASA, Takashi MINAMI, Daisuke HIGASHITARUMIZU