Patents by Inventor Daisuke IKEMOTO

Daisuke IKEMOTO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Coating apparatus
    Patent number: 9401291
    Abstract: A coating apparatus includes: a slit nozzle including a retention chamber that retains the coating material; a moving mechanism that moves the slit nozzle; a pressure regulation unit that regulates a pressure inside the retention chamber; and a control unit that controls the moving mechanism and the pressure regulation unit to relatively move the slit nozzle with respect to the substrate while changing the pressure inside the retention chamber toward an atmospheric pressure from a negative pressure, wherein the control unit is configured to control the pressure regulation unit so that a change in the pressure inside the retention chamber in a start zone including a coating start position and an end zone including a coating end position becomes slower than a change in the pressure inside the retention chamber in a middle zone except the start zone and the end zone.
    Type: Grant
    Filed: October 28, 2014
    Date of Patent: July 26, 2016
    Assignee: Tokyo Electron Limited
    Inventors: Yuji Mimura, Tetsuya Maki, Shigeto Tsuruta, Tatsumi Oonishi, Daisuke Ikemoto, Takahiro Masunaga
  • COATING APPARATUS
    Publication number: 20150128858
    Abstract: A coating apparatus includes: a slit nozzle including a retention chamber that retains the coating material; a moving mechanism that moves the slit nozzle; a pressure regulation unit that regulates a pressure inside the retention chamber; and a control unit that controls the moving mechanism and the pressure regulation unit to relatively move the slit nozzle with respect to the substrate while changing the pressure inside the retention chamber toward an atmospheric pressure from a negative pressure, wherein the control unit is configured to control the pressure regulation unit so that a change in the pressure inside the retention chamber in a start zone including a coating start position and an end zone including a coating end position becomes slower than a change in the pressure inside the retention chamber in a middle zone except the start zone and the end zone.
    Type: Application
    Filed: October 28, 2014
    Publication date: May 14, 2015
    Inventors: Yuji MIMURA, Tetsuya MAKI, Shigeto TSURUTA, Tatsumi OONISHI, Daisuke IKEMOTO, Takahiro MASUNAGA