Patents by Inventor Daisuke Kaminishi

Daisuke Kaminishi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230258686
    Abstract: A MEMS sensor includes: a pair of movable electrodes arranged to be parallel to each other with a space portion interposed between the pair of movable electrodes above a cavity portion provided in a substrate; and a fixed electrode arranged to be parallel to the pair of movable electrodes with a groove portion interposed between the fixed electrode and the pair of movable electrodes on an opposite side of the space portion with respect to the pair of movable electrodes, wherein the space portion includes a central portion having a first space width and end portions having a second space width, and wherein the first space width is shorter than the second space width.
    Type: Application
    Filed: December 30, 2022
    Publication date: August 17, 2023
    Applicant: ROHM CO., LTD.
    Inventor: Daisuke KAMINISHI
  • Publication number: 20230166967
    Abstract: A MEMS sensor includes: a first substrate having a cavity partially exposed on the surface of the first substrate; an electrode of a sensor element provided on the first substrate and arranged in the cavity; a support portion provided on the first substrate and configured to support the electrode; an element isolation portion formed on the first substrate so as to cover the support portion and configured to electrically isolate the electrode and the support portion from each other; an epitaxial growth layer formed on the electrode and the element isolation portion of the first substrate; and a second substrate bonded to the first substrate and configured to cover the sensor element, wherein the epitaxial growth layer has a monocrystalline portion arranged on the electrode and a polycrystalline portion arranged on the element isolation portion.
    Type: Application
    Filed: November 22, 2022
    Publication date: June 1, 2023
    Applicant: ROHM CO., LTD.
    Inventors: Daisuke KAMINISHI, Martin Wilfried HELLER, Toma FUJITA
  • Patent number: 8978469
    Abstract: A piezoelectric thin film structure includes a substrate, a silicon oxide film disposed on the substrate, a first aluminum oxide film disposed on the silicon oxide film, a lower electrode layer disposed on the first aluminum oxide film, a piezoelectric film layer disposed on the lower electrode layer, and an upper electrode layer disposed on the piezoelectric film layer.
    Type: Grant
    Filed: March 31, 2012
    Date of Patent: March 17, 2015
    Assignee: Rohm Co., Ltd.
    Inventors: Masaki Takaoka, Daisuke Kaminishi, Mizuho Okada, Nobuhisa Yamashita
  • Publication number: 20120247207
    Abstract: A piezoelectric thin film structure includes a substrate, a silicon oxide film disposed on the substrate, a first aluminum oxide film disposed on the silicon oxide film, a lower electrode layer disposed on the first aluminum oxide film, a piezoelectric film layer disposed on the lower electrode layer, and an upper electrode layer disposed on the piezoelectric film layer.
    Type: Application
    Filed: March 31, 2012
    Publication date: October 4, 2012
    Applicant: ROHM CO., LTD.
    Inventors: Masaki TAKAOKA, Daisuke KAMINISHI, Mizuho OKADA, Nobuhisa YAMASHITA
  • Patent number: 8136399
    Abstract: An angular rate sensor includes: a substrate; and a vibrator having a beam part supported in a state of floating from the substrate and a pair of supports formed on the substrate and provided at both ends of the beam part for supporting the beam part. The vibrator includes a piezoelectric film formed in the beam part, a detecting electrode for detecting an angular rate, the detecting electrode being formed on the piezoelectric film so as to extend toward a center portion of the beam part from one end thereof, and a driving electrode for vibrating the vibrator, the driving electrode being formed on the piezoelectric film so as to extend toward the center portion of the beam part from the other end thereof and to be spaced from the detecting electrode.
    Type: Grant
    Filed: December 23, 2008
    Date of Patent: March 20, 2012
    Assignee: Rohm Co., Ltd.
    Inventors: Masaki Takaoka, Daisuke Kaminishi, Yoshikazu Fujimori
  • Publication number: 20100206073
    Abstract: An angular velocity detecting device includes a semiconductor substrate (2); an oscillator (3) formed on the semiconductor substrate (2); and a control circuit (4) which is formed on the semiconductor substrate (2) and controls the oscillator (3).
    Type: Application
    Filed: September 25, 2008
    Publication date: August 19, 2010
    Applicant: Rohm Co., Ltd
    Inventors: Daisuke Kaminishi, Masaki Takaoka, Yoshikazu Fujimori
  • Publication number: 20090173156
    Abstract: An angular rate sensor includes: a substrate; and a vibrator having a beam part supported in a state of floating from the substrate and a pair of supports formed on the substrate and provided at both ends of the beam part for supporting the beam part. The vibrator includes a piezoelectric film formed in the beam part, a detecting electrode for detecting an angular rate, the detecting electrode being formed on the piezoelectric film so as to extend toward a center portion of the beam part from one end thereof, and a driving electrode for vibrating the vibrator, the driving electrode being formed on the piezoelectric film so as to extend toward the center portion of the beam part from the other end thereof and to be spaced from the detecting electrode.
    Type: Application
    Filed: December 23, 2008
    Publication date: July 9, 2009
    Applicant: Rohm Co., Ltd.
    Inventors: Masaki Takaoka, Daisuke Kaminishi, Yoshikazu Fujimori