Abstract: A film forming method includes preparing a substrate having an amorphous silicon film on a surface thereof, diffusing nickel into the amorphous silicon film by supplying a nickel source gas to the amorphous silicon film, and forming a polycrystalline silicon film by heating the amorphous silicon film, and crystallizing the amorphous silicon film by metal-induced lateral crystallization using the nickel diffused in the amorphous silicon film as a nucleus.

Abstract: There is provided a flow rate regulating device including a valve body section having a flat valve body surface, a valve seat section having a flat valve seat surface, a regulation mechanism that moves the valve body section along an axis, and a control unit that controls the regulation mechanism, wherein the regulation mechanism has a stepping motor that rotates a drive shaft about the axis, and a moving member that moves along the axis in response to the rotation of the drive shaft and is coupled to the valve body section, and the control unit controls the stepping motor so that the valve body section moves in a movement range in which the valve body surface and the valve seat surface maintain a non-contact state, in accordance with an excitation signal that changes by a micro step unit obtained by dividing a step by a predetermined division number.

Abstract: There is provided a flow rate regulating device including a valve body section having a flat valve body surface, a valve seat section having a flat valve seat surface, a regulation mechanism that moves the valve body section along an axis, and a control unit that controls the regulation mechanism, wherein the regulation mechanism has a stepping motor that rotates a drive shaft about the axis, and a moving member that moves along the axis in response to the rotation of the drive shaft and is coupled to the valve body section, and the control unit controls the stepping motor so that the valve body section moves in a movement range in which the valve body surface and the valve seat surface maintain a non-contact state, in accordance with an excitation signal that changes by a micro step unit obtained by dividing a step by a predetermined division number.

Abstract: A photosensitive composition comprising a quinonediazide compound and a binder resin, wherein said resin is a resin obtained by condensing a phenol component comprising the following (1) to (3), and an aldehyde or a ketone, and X.gtoreq.0.57, where X=A/B, where A is an integrated value of peaks from 23.0 to 31.0 ppm, and B is an integrated value of peaks from 23.0 to 37.0 ppm, in the .sup.

Abstract: Disclosed herein is a photosensitive composition comprising:(A) 5 to 60 wt % of an o-quinonediazide compound;(B) 0.05 to 10 wt % of an s-triazine compound(C) 0.01 to 10 wt % of a dye for changing the color tone by the interaction with the photodecomposition product of the said s-triazine compound;(D) 30 to 90 wt % of a novolak resin containing less than 5 wt % of phenols; and(E) 1 to 60 wt % of a vinyl-based polymer having at least a phenolic hydroxyl group.