Abstract: A compact versatile cell-type cleaning device and cell-type drying device is provided. A cleaning apparatus includes: a cover having a loading port formed on a wall surface of a cleaning chamber, and an unloading port formed on a wall surface of a drying chamber; a partition plate having an intermediate transfer port for dividing into the cleaning chamber and the drying chamber; an intermediate door that opens and closes the intermediate transfer port; a turntable disposed inside the drying chamber and having a first gripping device that grips an object, and a moving device having a gripping device that grips the object through a loading port, cleans the object inside the cleaning chamber while gripping the object, and moves the object to the turntable.

Abstract: A dryer for increasing the dryness by fixing the inside of a bowl-shaped workpiece toward a rotating table side is provided. A dryer for drying an object includes a rotatable hollow cylindrical rotation shaft, a center shaft supported inside of the rotation shaft via a bearing and does not rotate, the center shaft having an inner blow passage therein extending along the center shaft, a rotation plate fixed to the first end of the rotation shaft; an inner fixed nozzle extending along the first end of the rotation shaft from the center shaft, a jig disposed on the rotation plate for fixing the object, a drive motor for rotating the rotation shaft, and a blower connected to the inner blow passage.

Abstract: A compact versatile cell-type cleaning device and cell-type drying device is provided. A cleaning apparatus includes: a cover having a loading port formed on a wall surface of a cleaning chamber, and an unloading port formed on a wall surface of a drying chamber; a partition plate having an intermediate transfer port for dividing into the cleaning chamber and the drying chamber; an intermediate door that opens and closes the intermediate transfer port; a turntable disposed inside the drying chamber and having a first gripping device that grips an object, and a moving device having a gripping device that grips the object through a loading port, cleans the object inside the cleaning chamber while gripping the object, and moves the object to the turntable.

Abstract: A dryer for increasing the dryness by fixing the inside of a bowl-shaped workpiece toward a rotating table side is provided. A dryer for drying an object includes a rotatable hollow cylindrical rotation shaft, a center shaft supported inside of the rotation shaft via a bearing and does not rotate, the center shaft having an inner blow passage therein extending along the center shaft, a rotation plate fixed to the first end of the rotation shaft; an inner fixed nozzle extending along the first end of the rotation shaft from the center shaft, a jig disposed on the rotation plate for fixing the object, a drive motor for rotating the rotation shaft, and a blower connected to the inner blow passage.