Abstract: A microphone has a MEMS acoustic transducer having a frame-shaped support, and a membrane including a diaphragm as a movable electrode, covering an opening in the support, an integrated circuit that amplifies the output from the MEMS acoustic transducer, and a housing that houses the MEMS acoustic transducer and the integrated circuit. The housing includes a sound port bearing partition with a sound port formed therein. The MEMS acoustic transducer is secured in the housing with the membrane thereof facing the inner surface of the sound port bearing partition to form a closed space inward of the sound port bearing partition of the housing between the membrane and the sound port bearing partition. The closed space communicates with the outside via the sound port.

Abstract: A microphone has a MEMS acoustic transducer having a frame-shaped support, and a membrane including a diaphragm as a movable electrode, covering an opening in the support, an integrated circuit that amplifies the output from the MEMS acoustic transducer, and a housing that houses the MEMS acoustic transducer and the integrated circuit. The housing includes a sound port bearing partition with a sound port formed therein. The MEMS acoustic transducer is secured in the housing with the membrane thereof facing the inner surface of the sound port bearing partition to form a closed space inward of the sound port bearing partition of the housing between the membrane and the sound port bearing partition. The closed space communicates with the outside via the sound port.

Abstract: In an array type capacitance sensor (1), a slit (2b) is provided between each pair of adjacent ones of multiple movable electrodes (6) on a movable-electrode-side substrate (2) so as to extend in parallel with the movable electrodes (6). This allows providing an array type capacitance sensor capable of being produced inexpensively and measuring pressure precisely and stably even on a curved surface.

Abstract: In an array type capacitance sensor (1), a slit (2b) is provided between each pair of adjacent ones of multiple movable electrodes (6) on a movable-electrode-side substrate (2) so as to extend in parallel with the movable electrodes (6). This allows providing an array type capacitance sensor capable of being produced inexpensively and measuring pressure precisely and stably even on a curved surface.

Abstract: A flow-velocity measuring device of a simple structure in which the size in the direction of flow of a measured fluid is small and the size of a surface area for blocking the flow of the measured fluid is small includes: an inlet port formed on a surface of a main body and opening toward the upstream of a measured fluid; an introducing channel extending in the main body from the inlet port; a branch channel branched from the introducing channel and connected at a terminal end thereof to a first discharge port opening on the surface of the main body; a discharge channel extending from the introducing channel and connected at a terminal end thereof to a second discharge port opening on the surface of the main body; and a sensor element provided in the branch channel or in a measuring channel further branched from the branch channel and connected at a terminal end thereof to a third discharge port opening on the surface of the main body, and at least any one of the discharge channel, the introducing channel, the

Abstract: The present invention provides a small-sized electrostatic condenser type pressure sensor having high assembly accuracy but no dispersion in a detection accuracy, and a method for manufacturing the pressure sensor. An annular spacer is mounted on the confronting faces of substrates around flat electrodes, and a frit is mounted around the spacer and is made of a material having a lower softening or melting point than that of the spacer.

Abstract: A flow-velocity measuring device of a simple structure in which the size in the direction of flow of a measured fluid is small and the size of a surface area for blocking the flow of the measured fluid is small includes: an inlet port formed on a surface of a main body and opening toward the upstream of a measured fluid; an introducing channel extending in the main body from the inlet port; a branch channel branched from the introducing channel and connected at a terminal end thereof to a first discharge port opening on the surface of the main body; a discharge channel extending from the introducing channel and connected at a terminal end thereof to a second discharge port opening on the surface of the main body; and a sensor element provided in the branch channel or in a measuring channel further branched from the branch channel and connected at a terminal end thereof to a third discharge port opening on the surface of the main body, and at least any one of the discharge channel, the introducing channel, the

Abstract: A pressure sensor assembling structure capable of keeping a homogeneous detection accuracy without any error that might otherwise be caused by a stress at an assembling time, and an assembling method for the assembling structure. This structure is constructed to comprise: a base having a fluid inlet port on one end side and an opening communicating with the fluid inlet port on the other end side; and a sensor element inserted from the opening of the base and fixed in the base such that a connecting face formed on its one side is exposed from the side of the opening.

Abstract: The present invention provides a small-sized electrostatic condenser type pressure sensor having high assembly accuracy but no dispersion in a detection accuracy, and a method for manufacturing the pressure sensor. An annular spacer is mounted on the confronting faces of substrates around flat electrodes, and a frit is mounted around the spacer and is made of a material having a lower softening or melting point than that of the spacer.