Abstract: An acoustic wave device includes an insulating layer including a recess, a piezoelectric layer on the insulating layer and over the recess to define a cavity, a first excitation electrode on a first surface of the piezoelectric layer opposite to the cavity, a second excitation electrode on a second surface of the piezoelectric layer and within the cavity, a dielectric layer on the first excitation electrode, and a first frame on the second excitation electrode and within the cavity.

Abstract: An acoustic wave device includes an insulating layer and a piezoelectric layer defining a cavity, a first excitation electrode on a first surface of the piezoelectric layer opposite to the cavity, a second excitation electrode on a second surface of piezoelectric layer and within the cavity, a wiring electrode on the piezoelectric layer and connected to the first excitation electrode, a lid, a conductive wall extending between a first portion of the wiring electrode and the lid, and a sealing frame extending between a second portion of the wiring electrode and the lid. A first width of a first portion of the sealing frame is larger than a second width of a second portion of the sealing frame. A third width of the second portion of the wiring electrode is smaller than the first width and is larger than the second width.

Abstract: The packaged flow sensor is a packaged flow sensor for use by being fixed to an external substrate and includes a flow sensor chip including a sensor unit configured to detect a flow rate of a fluid, a case member including an opening toward the external substrate and configured to house the sensor unit in a state in which the sensor unit faces the opening, and a fixing member protruding from the case member toward the external substrate and configured to fix the packaged flow sensor to the external substrate.

Abstract: A pressure sensor includes a detection element that detects a change in pressure, and a cover member that accommodates the detection element and that includes a first through hole and a second through hole. Each of the first through hole and the second through hole is provided at a position that does not overlap the detection element in a front view of the respective hole.

Abstract: A pressure sensor includes a detection element that detects a change in pressure, and a cover member that accommodates the detection element and that includes a first through hole and a second through hole. Each of the first through hole and the second through hole is provided at a position that does not overlap the detection element in a front view of the respective hole.

Abstract: An electrostatic micro relay has a substrate, a signal line arranged on the substrate and having an input point configured to receive a signal and a plurality of signal channels configured to distribute the signal, the plurality of signal channels being each formed with a fixed contact, a plurality of movable contacts, each provided with respect to each of the fixed contacts and arranged so as to be opposed to a corresponding fixed contact across a space, a plurality of movable electrodes, each connected to each of the plurality of movable contacts and configured to make the connected movable contact brought into contact with and separated from the corresponding fixed contact, a cap, formed with a space configured to house the plurality of movable electrodes, and bonded with the substrate, and a signal input portion.

Abstract: A high-frequency switch configured to transmit differential signals including first and second signals, has first and second switches each comprising an input terminal configured to receive a signal and two output terminals configured to output the signal, and a substrate comprising a first surface mounted with the first and second switches. The input terminal is arranged between the two output terminals. The first and second switches are arranged on the substrate along a direction intersecting with a direction in which the input terminal and the two output terminals are placed side by side. One terminal of the first switch and one terminal of the second switch are placed side by side along the direction in which the first and second switches are arranged.

Abstract: An electrostatic micro relay has a substrate, a signal line arranged on the substrate and having an input point configured to receive a signal and a plurality of signal channels configured to distribute the signal, the plurality of signal channels being each formed with a fixed contact, a plurality of movable contacts, each provided with respect to each of the fixed contacts and arranged so as to be opposed to a corresponding fixed contact across a space, a plurality of movable electrodes, each connected to each of the plurality of movable contacts and configured to make the connected movable contact brought into contact with and separated from the corresponding fixed contact, a cap, formed with a space configured to house the plurality of movable electrodes, and bonded with the substrate, and a signal input portion.