Abstract: An inspection assistance system includes an image acquirer and an image creator. The image acquirer acquires a standard image about a target. The standard image is associated with a condition parameter set at a standard value. The condition parameter is set as a part of a process condition concerning a surface condition of the target. The image creator creates, by reference to the standard value, a plurality of evaluation images about the target by changing the condition parameter based on a predetermined image creation model and the standard image.

Abstract: A chemically amplified positive-type photosensitive composition capable of forming a patterned resist film having a square cross-section of a nonresist portion and good plating liquid resistance, even when forming a thick patterned resist film; a photosensitive dry film including a photosensitive layer consisting of the photosensitive composition; a production method of a substrate having a template for plating using the photosensitive composition; and a production method of a plated article using the substrate having the template formed by the aforementioned method.

Abstract: A method for manufacturing a chemically amplified photosensitive composition capable of reducing a foreign matter derived from a sulfur-containing compound. The method includes an acid generating agent which generates an acid by irradiation with an active ray or radiation, a sulfur-containing compound which is a solid at room temperature, a first solvent having a Hansen solubility parameter in which a polar term ?p is 10 (MPa0.5) or more, and a second solvent which is different than the first solvent, the method including preparing a solution of the sulfur-containing compound by dissolving the sulfur-containing compound in the first solvent, and blending the solution of the sulfur-containing compound, the acid generating agent, and the second solvent.