Abstract: A workpiece transfer hand includes a support plate and a suction unit on the upper surface of the plate. The upper surface of the plate has a recess whose bottom is formed with first and second pressure ports. The suction unit includes an elevator, elastic member, and first/second cylindrical members. The elevator, vertically movable in the recess along a stroke, has a vertical suction hole. The elastic member biases the elevator upward or downward. The first cylindrical member expands and contracts vertically, with its upper end connected to the elevator to surround the suction hole and its lower end connected to the bottom of the recess to surround the first pressure port. The second cylindrical member expands and contracts vertically, with its upper end connected to the elevator and its lower end connected to the bottom of the recess to surround the second pressure port.

Abstract: A conveying device A is disposed inside a vacuum chamber B, includes a fixation base 1; a swivel base which is held rotatably with respect to the fixation base 1; linear movement mechanisms 3A, 3B supported by the swivel base 2; and hands 4A, 4B supported by the linear movement mechanisms 3A, 3B; and a transports work W placed on the hands 4A, 4B by operation of the linear movement mechanism 3A, 3B. Radiation plates 62, 63, 65 are provided at appropriate locations on a lower surface side of the swivel base or of the linear movement mechanisms 3A, 3B. The vacuum chamber is provided with heat absorption plates 61, 66 on a wall which faces the lower surface side of the swivel base 2.

Abstract: A transfer apparatus includes a stationary base, a lift base, a lifting mechanism for vertically moving the lift base, a rotary base mounted to the lift base, a rotating mechanism for rotating the rotary base about a vertical rotation axis, a linear moving mechanism supported by the rotary base, and a work hand supported by the linear moving mechanism. The lifting mechanism includes a slide guide mechanism for vertical movement of the lift base, and first and second screw-feeding mechanisms. Each screw-feeding mechanism includes a rotatable vertical screw shaft, and a nut member provided on the lift base and screwed onto the screw shaft. The first and the second screw-feeding mechanisms are spaced from each other, with the rotation axis of the rotary base being located between the first and the second screw-feeding mechanisms.

Abstract: A transfer apparatus includes a fixed base, a swivel, a lift mechanism for raising and lowering the swivel relative to the fixed base, a swivel mechanism for turning the swivel about a vertical swivel axis, a linear movement mechanism supported by the swivel, and a hand supported by the linear movement mechanism for transportation of a work along a linear horizontal travel stroke. The lift mechanism includes N (N is an integer equal to or greater than 2) lift members arranged for telescopic expansion and retraction relative to the fixed base. The lift mechanism also includes N lift drive mechanisms each for raising and lowering one of the lift members relative to an immediate lower-stage lift member. The swivel is supported by an uppermost one of the lift members. (FIG.

Abstract: A linear transfer mechanism includes a guide member, a transfer carriage movable along a horizontal linear transfer path provided on the guide member, and a drive mechanism provided with a drive pulley and an output belt wound around the drive pulley for reciprocating movement in a reciprocating movement section in parallel to the transfer path. The transfer mechanism also includes a drive source for driving the drive pulley. The transfer carriage is connected with the output belt of the drive mechanism by a connecting member. Both the drive mechanism and the drive source are supported by the guide member.

Abstract: A work transfer apparatus includes a hand mechanism, a scissors lift mechanism, a seat, and a rotary mechanism. The hand mechanism supports and reciprocates a work. The scissors lift mechanism supports the hand mechanism, and moves the hand mechanism vertically, i.e., raises or lowers it. The seat supports the scissors lift mechanism. The rotary mechanism rotates the seat around a vertical axis. The scissors lift mechanism includes a stage on which the hand mechanism is mounted, at least one scissors link, and a lift driver.

Abstract: A transfer apparatus includes a stationary base, a swivel supported by the stationary base to be rotatable about a vertical axis, a guide member mounted on the swivel, a linear movement mechanism supported by the swivel or the guide member, a hand supported by the linear movement mechanism and moved by the linear movement mechanism for carrying a work along a straight and horizontal travel stroke, a drive source disposed inside the stationary base, and a transmission shaft disposed along the vertical axis to transmit drive power from the drive source to the linear movement mechanism. The swivel includes an upper section and a lower section detachably connected with each other. The upper section has a connecting member supported by the upper section to be rotatable about the vertical axis. The connecting member has a detachable engagement member for engagement with the transmission shaft from the above.

Abstract: A conveying device A is disposed inside a vacuum chamber B, includes a fixation base 1; a swivel base which is held rotatably with respect to the fixation base 1; linear movement mechanisms 3A, 3B supported by the swivel base 2; and hands 4A, 4B supported by the linear movement mechanisms 3A, 3B; and a transports work W placed on the hands 4A, 4B by operation of the linear movement mechanism 3A, 3B. Radiation plates 62, 63, 65 are provided at appropriate locations on a lower surface side of the swivel base or of the linear movement mechanisms 3A, 3B. The vacuum chamber is provided with heat absorption plates 61, 66 on a wall which faces the lower surface side of the swivel base 2.

Abstract: A transfer apparatus includes a stationary base, a swivel rotatable around a vertical rotation axis, a linear movement mechanism supported by the swivel, a hand supported by the linear movement mechanism for transferring a work along a horizontal path, a driving power source in the stationary base, and a transmission shaft arranged along the rotation axis for transmitting driving force from the driving power source to the linear movement mechanism. The linear movement mechanism includes a driving mechanism and a guide rail for movably supporting the hand. The driving mechanism has a plurality of pulleys, including a driving pulley supported rotatably around a horizontal axis, and an output belt wound around the plurality of pulleys for reciprocal movement within a predetermined section extending parallel to the movement path. The hand is connected to the output belt via a connection member.

Abstract: A transfer apparatus includes a stationary base, a lift base, a lifting mechanism for vertically moving the lift base, a rotary base mounted to the lift base, a rotating mechanism for rotating the rotary base about a vertical rotation axis, a linear moving mechanism supported by the rotary base, and a work hand supported by the linear moving mechanism. The lifting mechanism includes a slide guide mechanism for vertical movement of the lift base, and first and second screw-feeding mechanisms. Each screw-feeding mechanism includes a rotatable vertical screw shaft, and a nut member provided on the lift base and screwed onto the screw shaft. The first and the second screw-feeding mechanisms are spaced from each other, with the rotation axis of the rotary base being located between the first and the second screw-feeding mechanisms.

Abstract: A transfer apparatus includes a stationary base, a swivel rotatably supported by the stationary base, and a linear movement mechanism supported by the swivel and including guide rails. Hands for carrying works are supported by the guide rails and movable along a horizontal straight travel path by the operation of the linear movement mechanism. A heat reflector is provided between the hands and the guide rails. A refrigerant circulation channel includes annular spaces for ensuring constant communication between a passage on the side of the stationary base and a passage on the side of the swivel. The refrigerant circulation channel includes cooling pipes held in contact with the heat reflector.

Abstract: A transfer apparatus includes a stationary base, a swivel rotatable around a vertical rotation axis, a linear movement mechanism supported by the swivel, a hand supported by the linear movement mechanism for transferring a work along a horizontal path, a driving power source in the stationary base, and a transmission shaft arranged along the rotation axis for transmitting driving force from the driving power source to the linear movement mechanism. The linear movement mechanism includes a driving mechanism and a guide rail for movably supporting the hand. The driving mechanism has a plurality of pulleys, including a driving pulley supported rotatably around a horizontal axis, and an output belt wound around the plurality of pulleys for reciprocal movement within a predetermined section extending parallel to the movement path. The hand is connected to the output belt via a connection member.

Abstract: A transfer apparatus includes a stationary base, a swivel supported by the stationary base to be rotatable about a vertical axis, a guide member mounted on the swivel, a linear movement mechanism supported by the swivel or the guide member, a hand supported by the linear movement mechanism and moved by the linear movement mechanism for carrying a work along a straight and horizontal travel stroke, a drive source disposed inside the stationary base, and a transmission shaft disposed along the vertical axis to transmit drive power from the drive source to the linear movement mechanism. The swivel includes an upper section and a lower section detachably connected with each other. The upper section has a connecting member supported by the upper section to be rotatable about the vertical axis. The connecting member has a detachable engagement member for engagement with the transmission shaft from the above.

Abstract: A transfer apparatus includes a fixed base, a swivel, a lift mechanism for raising and lowering the swivel relative to the fixed base, a swivel mechanism for turning the swivel about a vertical swivel axis, a linear movement mechanism supported by the swivel, and a hand supported by the linear movement mechanism for transportation of a work along a linear horizontal travel stroke. The lift mechanism includes N (N is an integer equal to or greater than 2) lift members arranged for telescopic expansion and retraction relative to the fixed base. The lift mechanism also includes N lift drive mechanisms each for raising and lowering one of the lift members relative to an immediate lower-stage lift member. The swivel is supported by an uppermost one of the lift members. (FIG.