Patents by Inventor Daisuke Takehara

Daisuke Takehara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dry etching method for perovskite oxide film
    Patent number: 5262001
    Abstract: A dry etching method for perovskite oxide film includes introduction of a hydrogen gas and an acetylacetone- or n-butyl acetate gas into an electron cyclotron resonance plasma etching system simultaneously so as to etch a perovskite oxide film.
    Type: Grant
    Filed: September 17, 1992
    Date of Patent: November 16, 1993
    Assignee: Sharp Kabushiki Kaisha
    Inventor: Daisuke Takehara